Harald Köstenbauer

Plansee (Austria) — Austria

Engineering · Physical Sciences

14h-index534citations43works2.02yr avg
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Research Topics

Metal and Thin Film Mechanics(26), Copper Interconnects and Reliability(18), Semiconductor materials and devices(14), ZnO doping and properties(6), GaN-based semiconductor devices and materials(6)

Publications43 total

A Comparison of 90° Bending for Foldable Electronics
Coatings·2024· 2 citedOpen Access
Optimization of doped lanthanated tungsten components in ion sources by determining the temperature profile for halogen processes
MRS Advances·2023· 1 cited
Optical properties of Mo and amorphous MoOx, and application to antireflection coatings for metals
Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena·2022· 3 citedOpen Access
Resistance Reduction in Molybdenum Films by Seed Layer Application
SVC ... Annual Technical Conference proceedings - Society of Vacuum Coaters. Technical Conference/Proceedings of the annual technical conference/Society of Vacuum Coaters Technical Conference proceedings·2021
48.4: Galvanic Corrosion of Molybdenum Alloys and Oxides in contact with Copper for Thin Film Transistors using Evans Diagrams
SID Symposium Digest of Technical Papers·2021· 2 cited
Improved electro-mechanical reliability of flexible systems with alloyed Mo-Ta adhesion layers
Thin Solid Films·2021· 6 cited
Residual stress determination in thin films by X-ray diffraction and the widespread analytical practice applying a biaxial stress model: An outdated oversimplification?
Applied Surface Science·2020· 19 cited
15‐3: Resistance Reduction of Mo Metallization by W Seed Layer
SID Symposium Digest of Technical Papers·2020· 5 cited
Balancing the electro-mechanical and interfacial performance of Mo-based alloy films
Materialia·2020· 13 cited
The sputter performance of an industrial-scale planar Mo-target over its lifetime: Target erosion and film properties
Surface and Coatings Technology·2019· 19 cited
Correlation of mechanical damage and electrical behavior of Al/Mo bilayers subjected to bending
Thin Solid Films·2019· 6 cited
Oxidation and wet-etching behavior of MoAlTi thin films deposited by sputtering from a rotatable MoAlTi compound target
Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena·2019· 1 cited
Electro-mechanical behavior of Al/Mo bilayers studied with in situ straining methods
Thin Solid Films·2018· 27 cited
Oxidation and wet etching behavior of sputtered Mo-Ti-Al films
Journal of Vacuum Science & Technology A Vacuum Surfaces and Films·2018· 6 cited
A correlative experimental and <i>ab initio</i> approach to improve the fracture behavior of Mo thin films by alloying with Cu
Applied Physics Letters·2017· 6 cited
Non-reactive dc magnetron sputter deposition of Mo-O thin films from ceramic MoOx targets
Surface and Coatings Technology·2017· 16 cited
Deformation behavior of Re alloyed Mo thin films on flexible substrates: In situ fragmentation analysis supported by first-principles calculations
Scientific Reports·2017· 25 citedOpen Access
Industrial-scale sputter deposition of molybdenum oxide thin films: Microstructure evolution and properties
Journal of Vacuum Science & Technology A Vacuum Surfaces and Films·2017· 22 cited
Processing and charge state engineering of MoO<i>x</i>
AIP Advances·2017· 20 citedOpen Access
Effects of processing on the stability of molybdenum oxide ultra-thin films
arXiv (Cornell University)·2016· 9 citedOpen Access
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Frequent Co-authors

Christian Mitterer(23), Jörg Winkler(23), Jozef Kečkéš(9), Megan J. Cordill(9), Christian Linke(8), G.A. Fontalvo(7), Robert Franz(6), Patrice Kreiml(6), Enrico Franzke(5), Martin Rausch(5), Tanja Jörg(5), Velislava L. Terziyska(4), Aitana Tarazaga Martín-Luengo(4), A. Bonanni(4), C. Adelhelm(4), Julia Pachlhofer(3), A. Hofer(3), Joerg Winkler(3), Jan Winkler(3), L. Klaiber(3)