Missouri University of Science and Technology — United States
Engineering · Physical Sciences
6h-index105citations19works0.02yr avg
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Research Topics
Advancements in Photolithography Techniques(10), Optical Coatings and Gratings(10), Copper Interconnects and Reliability(5), Nanofabrication and Lithography Techniques(5), Semiconductor materials and devices(4)
Publications19 total
Thin Solid Films·2021· 9 cited
ACS Applied Materials & Interfaces·2021· 11 cited
IEEE Transactions on Components Packaging and Manufacturing Technology·2019· 2 cited
Journal of The Electrochemical Society·2018
ECS Meeting Abstracts·2016
Journal of The Electrochemical Society·2016· 11 cited
Applied Surface Science·2015· 38 cited
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE·2007· 6 cited
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE·2005· 6 cited
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE·2003
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE·2002· 1 cited
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE·2002· 4 cited
Design considerations for bottom antireflective coating for 157 nm lithography
2002
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE·2001
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE·2001· 9 cited
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE·2000· 1 cited
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE·1999
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE·1999· 3 cited
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE·1998· 4 cited
Frequent Co-authors
Matthew J. O’Keefe(7), Gu Xu(4), James E. Lamb(4), Xie Shao(4), Vandana Krishnamurthy(4), James D. Meador(4), Yuanyuan Liu(3), Jiamu Huang(3), William G. Fahrenholtz(3), Kenichi Mizusawa(3), Marc Weimer(3), Jill Akers(3), Rama Puligadda(3), Kevin Foster(2), Tarek Nahlawi(2), Felix Almodovar(2), Yubao Wang(2), Yasuhisa Sone(2), Douglas J. Guerrero(2), Mandar Bhave(2)