Ismo Luusua

VTT Technical Research Centre of Finland — Finland

Engineering · Physical Sciences

4h-index39citations8works0.02yr avg
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Research Topics

Semiconductor materials and devices(4), 3D IC and TSV technologies(4), Electron and X-Ray Spectroscopy Techniques(2), Advanced Sensor and Energy Harvesting Materials(1), Advanced MEMS and NEMS Technologies(1)

Publications8 total

Fully tileable photodiode matrix for medical imaging by using through-wafer interconnects
Nuclear Instruments and Methods in Physics Research Section A Accelerators Spectrometers Detectors and Associated Equipment·2007· 4 cited
Fabrication of silicon based through-wafer interconnects for advanced chip scale packaging
Sensors and Actuators A Physical·2007· 24 cited
Fabrication and Characterization of IC Compatible Through-Wafer Polysilicon Interconnects
ECS Transactions·2007
Fabrication and Characterization of IC Compatible Through-Wafer Polysilicon Interconnects
ECS Meeting Abstracts·2006Open Access
Silicon semi 3D radiation detectors
IEEE Symposium Conference Record Nuclear Science 2004.·2005· 7 cited
Through-Wafer Polysilicon Interconnect Fabrication with <i>In-Situ</i> Boron Doping
MRS Proceedings·2005· 4 cited
Concentration Methods for the Detection of Trace Elements in UPW
Physica Scripta·2002
Characterization of Wet Chemistry Resist and Resist ResiduesRemoval Processes
Physica Scripta·1999

Frequent Co-authors

Kimmo Henttinen(5), Simo Eränen(3), Panu Pekko(3), Tapani Vehmas(3), Ji Fan(2), I. Hietanen(2), Mikko Juntunen(2), S. Leppävuori(1), Tuula Virolainen(1), J. Kalliopuska(1), K. Kurvinen(1), M. Eräluoto(1), J. Harkanen(1), K. Leinonen(1), M. Palviainen(1), M. Koski(1), Hannu Luoto(1), S. Er nen(1), Heini Saloniemi(1), Jouko Hintsala(1)