Ali K. Okyay

Stanford University — United States

Engineering · Physical Sciences

33h-index4.4kcitations205works2.02yr avg
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Research Topics

Semiconductor materials and devices(52), ZnO doping and properties(43), Photonic and Optical Devices(41), Thin-Film Transistor Technologies(35), Silicon Nanostructures and Photoluminescence(28)

Publications205 total

Hollow-cathode plasma deposited vanadium oxide films: Metal precursor influence on growth and material properties
Journal of Vacuum Science & Technology A Vacuum Surfaces and Films·2024· 2 cited
Low-temperature synthesis of crystalline vanadium oxide films using oxygen plasmas
Journal of Vacuum Science & Technology A Vacuum Surfaces and Films·2023· 6 cited
Aqueous degradation and atomic layer deposition (ALD) stabilization of BaAl2O4: Eu2+, Dy3+ long afterglow phosphors
Materials Chemistry and Physics·2023· 6 citedOpen Access
Reducing the β-Ga<sub>2</sub>O<sub>3</sub> Epitaxy Temperature to 240 °C via Atomic Layer Plasma Processing
ACS Applied Electronic Materials·2022· 7 cited
Low-Temperature Self-Limiting Growth of Cubic Boron Nitride Via Hollow-Cathode Plasma-Enhanced Atomic Layer Deposition
ECS Meeting Abstracts·2022
Investigation of Atomic Layer Deposition Post-Coating Properties of Phosphorescent SrAl<sub>2</sub>O<sub>4</sub>: Eu<sup>2+</sup>, Dy<sup>3+</sup> Fibers Produced By Electrospinning
ECS Meeting Abstracts·2022
Real-time <i>in situ</i> process monitoring and characterization of GaN films grown on Si (100) by low-temperature hollow-cathode plasma-atomic layer deposition using trimethylgallium and N2/H2 plasma
Journal of Vacuum Science & Technology A Vacuum Surfaces and Films·2021· 7 cited
Low-Temperature As-Grown Crystalline β-Ga<sub>2</sub>O<sub>3</sub> Films via Plasma-Enhanced Atomic Layer Deposition
ACS Applied Materials & Interfaces·2021· 34 cited
Exploring Inherently Selective Plasma Processing of Nitrides and Oxides Via Hollow-Cathode Plasma-Assisted Atomic Layer Deposition
ECS Meeting Abstracts·2020
Comparative Study on <i>in-situ</i> Ellipsometric Monitoring of III-Nitride Film Growth via Plasma-Enhanced Atomic Layer Deposition
Selected topics in electornics and systems·2020
Realization of Single Layer Microbolometer Detector Pixel Using ZnO Material
IEEE Sensors Journal·2020· 9 citedOpen Access
Elucidating the role of nitrogen plasma composition in the low-temperature self-limiting growth of indium nitride thin films
RSC Advances·2020· 20 citedOpen Access
Comparative Study on <i>in-situ</i> Ellipsometric Monitoring of III-Nitride Film Growth via Plasma-Enhanced Atomic Layer Deposition
International Journal of High Speed Electronics and Systems·2019· 3 cited
Formation OF ZINC OXIDE THIN FILMS BY COMBINED METHOD OF HYDROTHERMAL AND LAYERED ATOM DEPOSITION
SHILAP Revista de lepidopterología·2019Open Access
Determination and Improvement of Deposition Parameters of TiO2 Thin Films via ALD
Journal of Materials Science and Engineering B·2019· 1 citedOpen Access
Corrigendum: Enhancement of polycrystalline silicon solar cells efficiency using indium nitride particles (2015 <i>J. Opt</i>. <b>17</b> 105903)
Journal of Optics·2019· 1 citedOpen Access
Real-time <i>in situ</i> ellipsometric monitoring of aluminum nitride film growth via hollow-cathode plasma-assisted atomic layer deposition
Journal of Vacuum Science & Technology A Vacuum Surfaces and Films·2019· 21 cited
Electronic and Optical Properties of Atomic Layer-Deposited ZnO and TiO2
Journal of Electronic Materials·2018· 1 cited
Optical, Electrical, and Crystal Properties of TiO2 Thin Films Grown by Atomic Layer Deposition on Silicon and Glass Substrates
Journal of Electronic Materials·2018
Single layer microbolometer detector pixel using ZnO material
2018· 5 citedOpen Access
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Frequent Co-authors

Krishna C. Saraswat(12), Ammar Nayfeh(10), Sabri Alkis(7), David A. B. Miller(6), Necmi Bıyıklı(6), Amir Ghobadi(5), T. Gamze Ulusoy Ghobadi(5), Mohammad Ali Ghaffari(5), Nazek El‐Atab(5), Levent E. Aygün(4), Bülend Ortaç(4), Salman Latif(3), Duygu Kuzum(3), Kağan Topallı(3), Enes Battal(3), Furkan Çimen(3), Burak Tekcan(3), Abhijit Pethe(2), Paul C. McIntyre(2), Çağla Özgit-Akgün(2)