S. M. Campeau

Physics and Astronomy · Physical Sciences

3h-index31citations9works0.02yr avg
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Research Topics

Atomic and Molecular Physics(7), Laser Design and Applications(7), Diamond and Carbon-based Materials Research(4), Laser-Matter Interactions and Applications(2), Laser Material Processing Techniques(2)

Publications9 total

High-power collimated laser-plasma source for proximity x-ray nanolithography
Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena·2003· 4 cited
Compact high power laser-plasma X-ray source for lithography
2002
High-power laser-plasma x-ray source for lithography
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE·2002· 3 cited
High-Power Compact Laser-Plasma Source for X-ray Lithography
Japanese Journal of Applied Physics·2002· 9 cited
<title>Compact high-power laser-plasma x-ray source for lithography</title>
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE·2001
High Brightness and Power Nd:YAG Laser
Advanced Solid-State Lasers·2001· 3 cited
300 W Diode Pumped Nd:YAG Laser System for Soft X-Ray Generation
Advanced Solid-State Lasers·2001· 1 cited
<title>Microfocus soft x-ray source generated by a compact high-power laser plasma</title>
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE·2000· 2 cited
<title>High-power x-ray point source for next-generation lithography</title>
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE·1999· 9 cited

Frequent Co-authors

Harry Rieger(7), I. C. E. Turcu(7), R. A. Forber(7), Richard M. Foster(7), G. French(6), Michael F. Powers(6), C. J. Gaeta(5), Kelly L. Cassidy(5), James H. Morris(5), Peter Hark(4), R. K. Grygier(4), Juan R. Maldonado(3), Henry I. Smith(3), Michael Lim(3), C. Kelsy(3), Joe R. Naunguyan(3), Joseph Naungayan(2), Jay Burdett(2), H. Rieger(2), José R. Maldonado(2)