University of Michigan–Ann Arbor — United States
Engineering · Physical Sciences
2h-index42citations5works0.02yr avg
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Research Topics
Advanced MEMS and NEMS Technologies(2), Photonic and Optical Devices(1), Advanced Multi-Objective Optimization Algorithms(1), Probabilistic and Robust Engineering Design(1), Manufacturing Process and Optimization(1)
Publications5 total
TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers·2002· 28 cited
Overview of the CAEMENS™ framework and optimization of MEMS using statistical optimal design of experiments
1995· 2 cited
Integration of the Anisotropic-Silicon-Etching-Program ASEPtm within the CAEMEMStm CAD/CAE Framework
Infoscience (Ecole Polytechnique Fédérale de Lausanne)·1992
WIT transactions on the built environment·1970
Frequent Co-authors
S. B. Crary(5), R.A. Buser(2), Y. Zhang(1), J. R. Clark(1), Jeff Clark(1)