Libor Rufer

Engineering · Physical Sciences

16h-index849citations186works1.72yr avg
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Research Topics

Advanced MEMS and NEMS Technologies(83), Acoustic Wave Resonator Technologies(59), Mechanical and Optical Resonators(46), Advanced Sensor and Energy Harvesting Materials(28), Innovative Energy Harvesting Technologies(22)

Publications183 total

Piezoelectric MEMS Temperature Sensor based on Acoustic Flexural Plate Waves
2025Open Access
Editorial for the Special Issue on Micromachined Acoustic Transducers for Audio-Frequency Range
Micromachines·2025· 4 citedOpen Access
Piezoelectric Micromachined Microphone with High Acoustic Overload Point and with Electrically Controlled Sensitivity
Micromachines·2024· 2 citedOpen Access
Piezoelectric Micromachined Microphone with High Acoustic Overload Point and with Electrically Controlled Sensitivity
Preprints.org·2024· 1 citedOpen Access
Flexural Plate Wave Piezoelectric MEMS Pressure Sensor
2024· 1 citedOpen Access
Piezoelectric MEMS Flexural-Plate-Wave Transducer for Alignment of Microparticles in a Drying Droplet
IEEE Sensors Journal·2024· 2 citedOpen Access
Approaches to Piezoelectric Micromachined Microphone Design: Comparative Study
2024· 2 citedOpen Access
Flexural Plate Wave Piezoelectric MEMS Transducer for Cell Alignment in Aqueous Solution
Lecture notes in electrical engineering·2023· 1 cited
Cell Alignment in Aqueous Solution Employing a Flexural Plate Wave Piezoelectric MEMS Transducer
IEEE Access·2023· 6 citedOpen Access
Modeling and Measurement of an Ultrasound Power Delivery System for Charging Implantable Devices Using an AlN-Based pMUT as Receiver
Micromachines·2022· 21 citedOpen Access
Chaos in a non-linear non-buckled microresonator
HAL (Le Centre pour la Communication Scientifique Directe)·2022
Génération d'ultrasons à comportement chaotique par un micro-transducteur piézoélectrique non-linéaire
HAL (Le Centre pour la Communication Scientifique Directe)·2022
Piezoelectric MEMS Acoustic Transducer with Electrically-Tunable Resonant Frequency
Micromachines·2022· 15 citedOpen Access
Partial discharge detection with on-chip spiral inductor as a loop antenna
Review of Scientific Instruments·2021· 18 cited
Chaotic ultrasound generation using a nonlinear piezoelectric microtransducer
Journal of Micromechanics and Microengineering·2021· 5 citedOpen Access
Sensitivity and Performances Analysis of a Dynamic Pressure Narrow-Band Electrodynamic Micro-Sensor
The International Journal of Acoustics and Vibration·2020· 1 citedOpen Access
Performances Evaluation of On-Chip Large-Size-Tapped Transformer for MEMS Applications
IEEE Transactions on Instrumentation and Measurement·2020· 11 citedOpen Access
Air-coupled Ultrasonic Rangefinder with Meter-long Detection Range Based on a Dual-electrode PMUT Fabricated Using a Multi-user MEMS Process
2019· 14 cited
Mems Device with Piezoelectric Actuators for Driving Mechanical Vortexes in Aqueous Solution Drop
HAL (Le Centre pour la Communication Scientifique Directe)·2019
Piezoelectric Micromachined Acoustic Transducer with Electrically-Tunable Resonant Frequency
HAL (Le Centre pour la Communication Scientifique Directe)·2019
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Frequent Co-authors

Skandar Basrour(14), Man Wong(8), Salvador Mir(8), S. Mir(8), Farès Tounsi(5), Zhijian Zhou(5), Achraf Kachroudi(4), G. Vanko(4), A. Dhayni(4), Wei Ma(3), T. Lalinský(3), E. Simeu(3), C. Domingues(3), Alessandro Nastro(3), Marco Ferrari(3), Vittorio Ferrari(3), Brahim Mezghani(3), Mohamed Masmoudi(3), Édouard Salze(3), Alain Sylvestre(2)