Marko Vehkamäki

University of Helsinki — Finland

Engineering · Physical Sciences

29h-index2.2kcitations99works3.82yr avg
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Research Topics

Semiconductor materials and devices(48), Electronic and Structural Properties of Oxides(27), Ferroelectric and Piezoelectric Materials(13), Crystallization and Solubility Studies(13), X-ray Diffraction in Crystallography(13)

Publications99 total

Hollow-core wood hemicellulose-based microcapsules entrap probiotics within protective walls
Journal of Colloid and Interface Science·2026Open Access
Atomic layer etching of molybdenum with O2 and NbCl5
Journal of Vacuum Science & Technology A Vacuum Surfaces and Films·2025
Atomic Layer Etching of Tantalum with NbCl<sub>5</sub> and O<sub>2</sub>
Chemistry of Materials·2025· 1 citedOpen Access
Soot-doped natural snow and its albedo — results from field experiments
Työväentutkimus Vuosikirja·2024· 16 citedOpen Access
Selective gas phase pulsed etching of oxides with NbCl<sub>5</sub>
Journal of Materials Chemistry C·2024· 3 citedOpen Access
3D-printed sensor electric circuits using atomic layer deposition
Sensors and Actuators A Physical·2024· 3 citedOpen Access
Molecular layer deposition of hybrid silphenylene-based dielectric film
Advanced Composites and Hybrid Materials·2023· 9 citedOpen Access
Atomic Layer Deposition of Boron‐Doped Al<sub>2</sub>O<sub>3</sub> Dielectric Films
Advanced Materials Interfaces·2023· 3 citedOpen Access
<i>In vacuo</i> cluster tool for studying reaction mechanisms in atomic layer deposition and atomic layer etching processes
Journal of Vacuum Science & Technology A Vacuum Surfaces and Films·2023· 11 cited
Molecular Layer Deposition of Pyrrone Thin Films by Oxidative Polymerization
Advanced Materials Interfaces·2023· 2 citedOpen Access
3d-Printed Sensor Electric Circuits Using Atomic Layer Deposition
SSRN Electronic Journal·2023Open Access
Inherent area-selective atomic layer deposition of ZnS
Dalton Transactions·2023· 9 citedOpen Access
Atomic Layer Deposition of CsI and CsPbI<sub>3</sub>
Chemistry of Materials·2022· 20 citedOpen Access
Molecular Layer Deposition of Thermally Stable Polybenzimidazole‐Like Thin Films and Nanostructures
Advanced Materials Interfaces·2022· 2 citedOpen Access
Atomic layer deposition of GdF3 thin films
Journal of Vacuum Science & Technology A Vacuum Surfaces and Films·2022· 9 citedOpen Access
Toposelective vapor deposition of hybrid and inorganic materials inside nanocavities by polymeric templating and vapor phase infiltration
Nanoscale Advances·2022Open Access
Highly Material Selective and Self‐Aligned Photo‐assisted Atomic Layer Deposition of Copper on Oxide Materials
Advanced Materials Interfaces·2021· 7 citedOpen Access
Atomic Layer Deposition of Insulating AlF3/Polyimide Nanolaminate Films
Coatings·2021· 4 citedOpen Access
Novel electroblowing synthesis of tin dioxide and composite tin dioxide/silicon dioxide submicron fibers for cobalt(<scp>ii</scp>) uptake
RSC Advances·2021· 10 citedOpen Access
Atomic Layer Deposition of PbS Thin Films at Low Temperatures
Chemistry of Materials·2020· 33 citedOpen Access
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Frequent Co-authors

Mikko Ritala(40), Markku Leskelä(35), Marianna Kemell(18), Kenichiro Mizohata(16), Timo Hatanpää(14), Mikko Heikkilä(11), J. Räisänen(10), Miika Mattinen(7), Pasi Jalkanen(6), Timo Repo(5), Timo Sajavaara(4), Georgi Popov(4), Sari Rautiainen(4), Manjunath Puttaswamy(4), Kaupo Kukli(4), E. Raühala(3), Jani Hämäläinen(3), Kristoffer Meinander(3), Matti Putkonen(3), Esa Puukilainen(3)