M A F van den Boogaart

École Polytechnique Fédérale de Lausanne — Switzerland

Engineering · Physical Sciences

16h-index784citations81works0.02yr avg
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Research Topics

Nanofabrication and Lithography Techniques(52), Advanced Surface Polishing Techniques(14), Force Microscopy Techniques and Applications(13), Nanowire Synthesis and Applications(12), Advancements in Photolithography Techniques(12)

Publications81 total

NEMS/CMOS sensor for monitoring deposition rates in stencil lithography
Procedia Chemistry·2009Open Access
Structured ZnO-based contacts deposited by non-reactive rf magnetron sputtering on ultra-thin SiO2/Si through a stencil mask
Thin Solid Films·2009· 10 citedOpen Access
Nanomechanical test structure for optimal alignment in stencil-based lithography
2009
Nanomechanical mass sensor for monitoring deposition rates through confined apertures
2009
Dynamic stencil lithography on full wafer scale
Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena·2008· 24 citedOpen Access
Metallic Nanowires by Full Wafer Stencil Lithography
Nano Letters·2008· 106 citedOpen Access
Combining Micelle Self‐Assembly with Nanostencil Lithography to Create Periodic/Aperiodic Micro‐/Nanopatterns on Surfaces
Advanced Materials·2008· 15 citedOpen Access
Mechanical stabilisation and design optimisation of masks for stencil lithography: Numerical approach and experimental validation
Microelectronic Engineering·2008· 3 citedOpen Access
Full-wafer fabrication by nanostencil lithography of micro/nanomechanical mass sensors monolithically integrated with CMOS
Nanotechnology·2008· 54 citedOpen Access
Compact CMOS current conveyor for integrated NEMS resonators
IET Circuits Devices & Systems·2008· 4 citedOpen Access
Stencil-assisted reactive ion etching for micro and nano patterning
Microelectronic Engineering·2008· 7 citedOpen Access
Silicon nanoparticles synthesized in SiO2 pockets by stencil-masked low energy ion implantation and thermal annealing
Superlattices and Microstructures·2008· 5 citedOpen Access
Reusability of nanostencils for the patterning of Aluminum nanostructures by selective wet etching
Microelectronic Engineering·2008· 32 citedOpen Access
Etching of sub-micrometer structures through Stencil
Microelectronic Engineering·2008· 29 citedOpen Access
Resistivity measurements of gold wires fabricated by stencil lithography on flexible polymer substrates
Microelectronic Engineering·2008· 28 citedOpen Access
KFM detection of quantified charges injected into a thin SiO2 layer containing Si nps embedded by ultra low energy ion implantation using stencil lithography
Infoscience (Ecole Polytechnique Fédérale de Lausanne)·2008Open Access
Controlled synthesis of silicon nanocrystals into a thin SiO2 layer synthesized by stencil-masked ultra-low energy ion implantation
Infoscience (Ecole Polytechnique Fédérale de Lausanne)·2008Open Access
Sub-100 nm-scale aluminum nanowires by stencil lithography: Fabrication and characterization
2008· 1 citedOpen Access
Charging dynamics of localized 2D layers of Si nanocrystals embedded into SiO2 by stencil masked ultra low energy ion implantation process
Infoscience (Ecole Polytechnique Fédérale de Lausanne)·2008Open Access
Towards Reliable 100-Nanometer Scale Stencil Lithography on Fullwafer: Progress and Challenges
TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference·2007Open Access
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Frequent Co-authors

Juergen Brügger(44), L M Doeswijk(16), Veronica Savu(11), J. Grisolia(9), Luis Guillermo Villanueva(7), Julien Arcamone(7), Francesc Pérez‐Murano(7), C. Dumas(7), Arnaud Arbouet(7), Oscar Vázquez-Mena(6), Katrin Sidler(6), Maryna Lishchynska(6), James C. Greer(5), Vincent Paillard(5), G. Benassayag(5), Francisco Serra-Graells(4), G. Abadal(4), N. Barniol(4), Laurence Ressier(4), A. Claverie(4)