Morimichi Watanabe

NGK Insulators (Japan) — Japan

Physics and Astronomy · Physical Sciences

5h-index51citations7works0.02yr avg
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Research Topics

GaN-based semiconductor devices and materials(3), Ga2O3 and related materials(3), Advanced ceramic materials synthesis(2), Silicon Carbide Semiconductor Technologies(2), Metal and Thin Film Mechanics(2)

Publications7 total

Thermal reaction of polycrystalline SiC with XeF2
Journal of Vacuum Science & Technology A Vacuum Surfaces and Films·2005· 9 cited
Thermal reaction of polycrystalline AlN with XeF2
Journal of Vacuum Science & Technology A Vacuum Surfaces and Films·2005· 11 citedOpen Access
Surface Characterization of 3C-SiC Exposed to XeF<sub>2</sub>
Japanese Journal of Applied Physics·2004· 2 cited
Thermal Desorption Behavior of AlF<sub>3</sub>Formed on Al<sub>2</sub>O<sub>3</sub>
Japanese Journal of Applied Physics·2003· 5 cited
X-ray photoelectron spectroscopy of polycrystalline AlN surface exposed to the reactive environment of XeF2
Applied Surface Science·2003· 17 cited
Thermal Desorption Behavior of AlF 3 Formed on Al 2 O 3
2003· 1 cited
Identification of Desorption Products from the Thermal Reaction of AlN with XeF<sub>2</sub>Vapor Using Molecular Beam Mass Spectrometry and a Time-of-Flight Technique
Japanese Journal of Applied Physics·2003· 6 cited

Frequent Co-authors

Takashi Iida(7), Kyoichi Sawabe(7), Kosuke Shobatake(7), Keijiro Akiyama(5), Yukimasa Mori(4), Hiroaki Sakai(4), Takahiro Ishikawa(3), Takahiro Ishikawa(2), Hiroaki Sakai(2), Shogo Narita(2), Shunsuke Koide(2), Eri Maeta(2)