J. P. Doyle

Engineering · Physical Sciences

18h-index2.4kcitations49works0.02yr avg
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Research Topics

Semiconductor materials and devices(16), Metal and Thin Film Mechanics(10), Copper Interconnects and Reliability(10), Ion-surface interactions and analysis(10), Diamond and Carbon-based Materials Research(9)

Publications49 total

Integration of a Manufacturing Grade, k = 2.0 Spin-On Material in a Single Damascene Structure
ECS Journal of Solid State Science and Technology·2012· 15 cited
A 300-mm wafer-level three-dimensional integration scheme using tungsten through-silicon via and hybrid Cu-adhesive bonding
2008· 118 cited
Chip Package Interaction in Ultra Low-k/Copper Interconnect Technology
2007· 1 cited
Experimental Determination of the Toughness of Crack Stop Structures
2007· 17 cited
Thermal stress evolution in embedded Cu/low-k dielectric composite features
Applied Physics Letters·2006· 9 cited
Editorial Transition at Fathering
Fathering A Journal of Theory Research and Practice about Men as Fathers·2006
Hybrid lithography: The marriage between optical and e-beam lithography. A method to study process integration and device performance for advanced device nodes
Microelectronic Engineering·2006· 17 cited
A 45 nm CMOS node Cu/Low-k/ Ultra Low-k PECVD SiCOH (k=2.4) BEOL Technology
2006· 22 cited
Looking into the crystal ball: future device learning using hybrid e-beam and optical lithography (Keynote Paper)
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE·2005· 13 cited
Channel cracking in low-k films on patterned multi-layers
2004· 7 cited
Ion beam alignment for liquid crystal display fabrication
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms·2003· 49 cited
Liquid Crystal Alignment on Carbonaceous Surfaces with Orientational Order
Science·2001· 311 cited
56.1: Novel LC Alignment Method using Diamond Like Carbon Film and Ion Beam Alignment
SID Symposium Digest of Technical Papers·2001· 9 cited
Atomic-beam alignment of inorganic materials for liquid-crystal displays
Nature·2001· 392 cited
Color Filters for LCD Miniature Displays
SID Symposium Digest of Technical Papers·1999· 1 cited
Defect energy levels in electron-irradiated and deuterium-implanted<mml:math xmlns:mml="http://www.w3.org/1998/Math/MathML" display="inline"><mml:mn>6</mml:mn><mml:mi>H</mml:mi></mml:math>silicon carbide
Physical review. B, Condensed matter·1999· 77 cited
Electrically active point defects in n-type 4H–SiC
Journal of Applied Physics·1998· 74 citedOpen Access
Copper diffusion in amorphous germanium
Journal of Vacuum Science & Technology A Vacuum Surfaces and Films·1998· 5 cited
Observation of near-surface electrically active defects in n-type 6H–SiC
Journal of Applied Physics·1998· 1 cited
Electrically Active Defects in n-Type 4H- and 6H-SiC
Materials science forum·1998· 4 cited
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Frequent Co-authors

Jerome J. Cuomo(8), J. Bruley(7), J. J. Cuomo(7), David L. Pappas(6), B. G. Svensson(6), K. L. Saenger(5), M. O. Aboelfotoh(5), R. Roy(5), P. Chaudhari(4), Adolf Schöner(4), N. Nordell(4), Michael Lane(4), T. M. Shaw(4), E. Galligan(3), Alesandro Callegari(3), Minhua Lu(3), Sampath Purushothaman(3), J. Stöhr(3), Yukito Saitoh(3), Kazumi Sakai(3)