Jane P. Chang

Harvard UniversityUnited States

Engineering · Physical Sciences

49h-index7.7kcitations285works8.02yr avg

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Research Topics

Semiconductor materials and devices(140), Electronic and Structural Properties of Oxides(40), Plasma Diagnostics and Applications(36), Copper Interconnects and Reliability(32), Advancements in Semiconductor Devices and Circuit Design(30)

Publications283 total

The Journal of Physical Chemistry C·2025· 1 cited
ChemCatChem·2025· 2 cited
Journal of Vacuum Science & Technology A Vacuum Surfaces and Films·2025· 1 cited
Journal of Vacuum Science & Technology A Vacuum Surfaces and Films·2025
Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena·2024· 106 citedOpen Access
Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena·2024· 21 citedOpen Access
Journal of Vacuum Science & Technology A Vacuum Surfaces and Films·2024· 4 cited
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Frequent Co-authors

Ragesh Puthenkovilakam(8), Lin Sha(6), Yuanbing Mao(5), Kang L. Wang(5), Yi Lin(4), Jianyu Huang(4), Ju Hyeon Choi(3), Carey M. Tanner(3), Ya-Chuan Perng(3), Herbert H. Sawin(3), You-Sheng Lin(3), J. Sapjeta(2), R. L. Opila(2), Yang Yang(2), M. Moravej(2), Xian-Jie Yang(2), G R Nowling(2), Robert F. Hicks(2), S E Babayan(2), Xia Guo(2)