Harvard University — United States
Engineering · Physical Sciences
49h-index7.7kcitations285works8.02yr avg
Accepting Students?
No reports yet. Know if this professor is taking students?
Research Topics
Semiconductor materials and devices(140), Electronic and Structural Properties of Oxides(40), Plasma Diagnostics and Applications(36), Copper Interconnects and Reliability(32), Advancements in Semiconductor Devices and Circuit Design(30)
Publications283 total
The Journal of Physical Chemistry C·2025· 1 cited
arXiv (Cornell University)·2025Open Access
ChemCatChem·2025· 2 cited
Journal of Vacuum Science & Technology A Vacuum Surfaces and Films·2025· 1 cited
Journal of Vacuum Science & Technology A Vacuum Surfaces and Films·2025
Journal of Clinical Oncology·2025· 3 cited
Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena·2024· 106 citedOpen Access
Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena·2024· 21 citedOpen Access
The Journal of Pediatrics Clinical Practice·2024· 4 citedOpen Access
Journal of Vacuum Science & Technology A Vacuum Surfaces and Films·2024· 4 cited
Art and Design·2024Open Access
Applied Physics Letters·2023· 3 cited
page 1 of 15Next →
Frequent Co-authors
Ragesh Puthenkovilakam(8), Lin Sha(6), Yuanbing Mao(5), Kang L. Wang(5), Yi Lin(4), Jianyu Huang(4), Ju Hyeon Choi(3), Carey M. Tanner(3), Ya-Chuan Perng(3), Herbert H. Sawin(3), You-Sheng Lin(3), J. Sapjeta(2), R. L. Opila(2), Yang Yang(2), M. Moravej(2), Xian-Jie Yang(2), G R Nowling(2), Robert F. Hicks(2), S E Babayan(2), Xia Guo(2)