Beneq (Finland) — Finland
Physics and Astronomy · Physical Sciences
1h-index15citations3works0.02yr avg
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Research Topics
GaN-based semiconductor devices and materials(3), Semiconductor materials and devices(2), Acoustic Wave Resonator Technologies(2), ZnO doping and properties(1), Metal and Thin Film Mechanics(1)
Publications3 total
Journal of Vacuum Science & Technology A Vacuum Surfaces and Films·2019· 14 cited
Thermal atomic layer deposition of aluminum nitride thin films from AlCl3
2018
Frequent Co-authors
Zhen Zhu(2), Kari Härkönen(1), Emma Salmi(1), Erik Østreng(1), Iiris Tuoriniemi(1), Kalle Niiranen(1), Sami Sneck(1)