National Institute of Standards and Technology — United States
Engineering · Physical Sciences
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Research Topics
Advancements in Photolithography Techniques(54), Nanofabrication and Lithography Techniques(53), Copper Interconnects and Reliability(39), Advanced Battery Materials and Technologies(30), Material Dynamics and Properties(30)
Publications344 total
Frequent Co-authors
Wen‐Li Wu(12), Eric K. Lin(10), Hyun Wook Ro(8), Ronald L. Jones(8), Jack F. Douglas(7), Yifu Ding(7), Kirt A. Page(6), Albert F. Yee(5), Bryan D. Vogt(5), Dean M. DeLongchamp(4), Darı́o L. Goldfarb(4), Marie Angelopoulos(4), Alexei P. Sokolov(4), Hae‐Jeong Lee(4), Vladimir P. Oleshko(3), Marcus T. Cicerone(3), R. Joseph Kline(3), Edwin P. Chan(3), David W. Gidley(3), Sushil K. Satija(3)