Physics and Astronomy · Physical Sciences
7h-index114citations18works0.02yr avg
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Research Topics
GaN-based semiconductor devices and materials(13), ZnO doping and properties(5), Metal and Thin Film Mechanics(5), Ga2O3 and related materials(5), Semiconductor materials and devices(4)
Publications18 total
The next generation way of the process control of the atomic layer deposition
The Japan Society of Applied Physics·2019
Journal of Crystal Growth·2016· 4 cited
Journal of Crystal Growth·2016· 18 cited
Journal of Crystal Growth·2016· 10 cited
Japanese Journal of Applied Physics·2016· 3 cited
Japanese Journal of Applied Physics·2016· 10 cited
Japanese Journal of Applied Physics·2016· 19 cited
Extended Abstracts of the 2015 International Conference on Solid State Devices and Materials·2015
Journal of Crystal Growth·2015· 14 cited
Single-crystallite (1013)GaN on the nominal Si(001) substrate by the directional sputtered AlN intermediate layer
The Japan Society of Applied Physics·2015
MRS Proceedings·2015· 4 cited
Orientation improvement of the sputtered AlN on Si by the Ti pre-orientation layer
The Japan Society of Applied Physics·2014
GaN growth on narrow sputtered AlN stripes on (111) Si substrates
The Japan Society of Applied Physics·2013
Journal of Crystal Growth·2012· 14 cited
Physica status solidi. C, Conferences and critical reviews/Physica status solidi. C, Current topics in solid state physics·2012· 5 cited
AIP conference proceedings·1991· 1 cited
Journal of Physics G Nuclear Physics·1985· 12 cited
Spiral (Imperial College London)·1982Open Access
Frequent Co-authors
Yoshio Honda(10), Hiroshi Amano(10), Si‐Young Bae(4), Kaddour Lekhal(4), Akira Tamura(4), Maki Kushimoto(3), Manato Deki(3), Joo‐Ho Lee(2), Tomoyuki Tanikawa(2), D. Breitig(2), H.A. Baader(2), H. Seyfarth(2), K. Schreckenbach(2), I.A. Kondurov(2), P. A. Sushkov(2), M. Bogdanović(2), Shigeyoshi Usami(2), Mutsuhito Sugiura(1), Kohei Yamashita(1), Y. Inoue(1)