Florian Krüger

University of Michigan — United States

Engineering · Physical Sciences

6h-index155citations23works7.02yr avg
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Research Topics

Plasma Diagnostics and Applications(9), Semiconductor materials and devices(8), Video Surveillance and Tracking Methods(3), Metal and Thin Film Mechanics(3), Anomaly Detection Techniques and Applications(3)

Publications23 total

Autonomous hybrid optimization of a SiO2 plasma etching mechanism
Journal of Vacuum Science & Technology A Vacuum Surfaces and Films·2024· 5 cited
Voltage waveform tailoring for high aspect ratio plasma etching of SiO2 using Ar/CF4/O2 mixtures: Consequences of low fundamental frequency biases
Physics of Plasmas·2024· 9 citedOpen Access
Voltage waveform tailoring for high aspect ratio plasma etching of SiO2 using Ar/CF4/O2 mixtures: Consequences of ion and electron distributions on etch profiles
Journal of Vacuum Science & Technology A Vacuum Surfaces and Films·2022· 15 citedOpen Access
Comparison of glancing-angle scatterings on different materials in a high aspect ratio plasma etching process using molecular dynamics simulation
Journal of Vacuum Science & Technology A Vacuum Surfaces and Films·2022· 5 cited
Voltage Waveform Tailoring in Plasma Etching of Dielectrics to Mitigate Surface Charging Effects
2022 IEEE International Conference on Plasma Science (ICOPS)·2022
Temporal Extension for Encoder-Decoder-based Crowd Counting Approaches
2021· 2 cited
VisDrone-CC2020: The Vision Meets Drone Crowd Counting Challenge Results
arXiv (Cornell University)·2021Open Access
Electric field reversals resulting from voltage waveform tailoring in Ar/O <sub>2</sub> capacitively coupled plasmas sustained in asymmetric systems
Plasma Sources Science and Technology·2021· 15 citedOpen Access
ICP vs CCP in High Aspect Ratio Etching of SiO<sub>2</sub> using Ar/C<sub>4</sub>F<sub>8</sub>/O<sub>2</sub> Gas Mixtures
2020 IEEE International Conference on Plasma Science (ICOPS)·2020· 1 cited
Formation and behaviour of plasma spots on the surface of titanium film
Journal of Physics D Applied Physics·2020· 7 cited
VisDrone-CC2020: The Vision Meets Drone Crowd Counting Challenge Results
Lecture notes in computer science·2020· 20 citedOpen Access
Aufarbeitung der Konnektivität von Schienennetzen aus OpenStreetMap in SUMO
elib (German Aerospace Center)·2019
Student Excellence Award Finalist: A potential remedy for etched trench deformations based on voltage waveform tailoring and electric field reversal
Bulletin of the American Physical Society·2019
Voltage waveform tailoring in radio frequency plasmas for surface charge neutralization inside etch trenches
Plasma Sources Science and Technology·2019· 73 citedOpen Access
Theoretische Grundlagen
2015
Fazit und Ausblick
2015
Einleitung
2015
Fallstudien zur narrativen Unternehmenskommunikation
2015
Untersuchung der Korrelation zwischen Maus- und Augenbewegungen bei Webseiten
OPUS Publication Server of the University of Stuttgart (University of Stuttgart)·2014Open Access
Using Large Scale Parallel Systems for Complex Crystallographic Problems in Materials Science, chapter 17
SPIRE - Sciences Po Institutional REpository·2013
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Frequent Co-authors

Mark J. Kushner(7), Sang Ki Nam(5), Thomas Golda(3), Hyunjae Lee(3), Sebastian Wilczek(2), Julian Schulze(2), Dawei Du(2), Longyin Wen(2), Pengfei Zhu(2), Heng Fan(2), Qinghua Hu(2), Haibin Ling(2), Mubarak Shah(2), Junwen Pan(2), Ali Al-Ali(2), Amr Mohamed(2), Bakour Imene(2), Bin Dong(2), Binyu Zhang(2), Bouchali Hadia Nesma(2)