F. Hedrich

Engineering · Physical Sciences

9h-index565citations18works0.02yr avg
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Research Topics

Advanced MEMS and NEMS Technologies(11), Gas Sensing Nanomaterials and Sensors(5), Advanced Sensor and Energy Harvesting Materials(3), Sensor Technology and Measurement Systems(3), Advanced Sensor Technologies Research(3)

Publications18 total

7.3 - Novel Miniaturized Thermoelectric Hydrogen Pressure Sensor
2024Open Access
Modelling and Characterization of an Electro-Thermal MEMS Device for Gas Property Determination
2023
P09 - Characterization and Modeling of Thermal MEMS for Selective Determination of Gas Properties
Poster·2023Open Access
Plasma techniques in the production of customized MEMS‐applications
Plasma Processes and Polymers·2019· 3 cited
Modelling of technological reliability in traffic logistic networks in urban areas
MATEC Web of Conferences·2016· 2 citedOpen Access
Sensor for gas analysis based on thermal conductivity, specific heat capacity and thermal diffusivity
2011· 19 cited
Thermal flow sensors for MEMS spirometric devices
Sensors and Actuators A Physical·2010· 48 cited
Thermal flow sensors for MEMS spirometric devices
Procedia Chemistry·2009· 4 citedOpen Access
Thermal flow sensors for harsh environment applications
Procedia Chemistry·2009· 5 citedOpen Access
Monolithic integration of micro-channel on disposable flow sensors for medical applications
Sensors and Actuators A Physical·2008· 23 cited
Monolithic Integration of Micro-Channel on Disposable Flow Sensors for Medical Applications
TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference·2007· 5 cited
Thermal flow sensor for liquids and gases
2002· 48 cited
Convection-based micromachined inclinometer using SOI technology
2002· 33 cited
Micromachined inclinometer with high sensitivity and very good stability
Sensors and Actuators A Physical·2002· 102 cited
Micromachined inclinometer with high sensitivity and very good stability
2001· 9 cited
Structuring of membrane sensors using sacrificial porous silicon
Sensors and Actuators A Physical·2000· 56 cited
Thermal flow sensor for liquids and gases based on combinations of two principles
Sensors and Actuators A Physical·1999· 195 cited
Thermal Flow Sensor for Liquids and Gases
Micro-Electro-Mechanical Systems (MEMS)·1998· 13 cited

Frequent Co-authors

S. Billat(13), Walter Lang(7), H. Glosch(6), H. Sandmaier(6), Roland Zengerle(6), M. Ashauer(5), J. Auber(5), K. Kliche(5), Alfons Dehé(4), N. Hey(3), M Kunze(3), J. Frech(3), M. Storz(3), Philipp Raimann(3), Werenfrid Wimmer(2), R. Gronmaier(2), P. Nommensen(2), H. Ashauer(2), Christoph Ziegler(1), G. Kattinger(1)