Ruizhe Qian

Zhejiang Energy Research InstituteChina

Engineering · Physical Sciences

11h-index553citations37works1.02yr avg

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Research Topics

Semiconductor materials and devices(22), Thin-Film Transistor Technologies(22), Silicon Nanostructures and Photoluminescence(17), Silicon and Solar Cell Technologies(16), Ion-surface interactions and analysis(10)

Publications37 total

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena·1993· 1 cited
Applied Physics Letters·1993· 35 cited
Journal of Vacuum Science & Technology A Vacuum Surfaces and Films·1992· 2 cited
Si Atomic Layer Epitaxy Using Remote Plasma Assisted Hydrogen Desorption and Disilane as a Precursor
Defense Technical Information Center (DTIC)·1992
A Simple Controller for Repetitive Cycles in Atomic Layer Epitaxy
Defense Technical Information Center (DTIC)·1992
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Frequent Co-authors

A.F. Tasch(33), D. Kinosky(25), Tsan‐sheng Hsu(22), Sanjay K. Banerjee(21), J. Irby(19), B. Anthony(19), A. Mahajan(18), C. W. Magee(14), Samuel Thomas(12), L. Breaux(7), H.L. Marcus(4), J. Fretwell(4), Pablo Munguia(4), S. Lin(3), S. Banerjee(3), Sunil Thomas(3), Joe C. Campbell(2), S. Banerjee(2), Charlotte L. Grove(2), Shayak Banerjee(2)