Eric Eva

Carl Zeiss (Germany) — Germany

Engineering · Physical Sciences

8h-index246citations25works0.02yr avg
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Research Topics

Laser Material Processing Techniques(16), Solid State Laser Technologies(8), Surface Roughness and Optical Measurements(7), Nonlinear Optical Materials Studies(5), Laser Design and Applications(5)

Publications25 total

Compaction and rarefaction of fused silica with 193-nm excimer laser exposure
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE·2003· 11 cited
Two-photon equivalent weighting of spatial excimer laser beam profiles
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE·2001
Nonlinear absorption of thin Al_2O_3 films at 193 nm
Applied Optics·2000· 21 cited
Characterizing absorption and total scattering losses on optical components for 193-nm wafer steppers
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE·1999
Characterization of absorption and scatter losses on optical components for ArF excimer lasers
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE·1999· 4 cited
ArF radiation resistance of optical coatings on CaF 2 in relation to the surface finish of the substrate
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE·1999· 1 cited
Characterizing the absorption and aging behavior of DUV optical material by high-resolution excimer laser calorimetry
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE·1998· 6 cited
Stability of optical interference coatings exposed to low-fluence 193-nm ArF radiation
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE·1998· 1 cited
Surface finish and optical quality of CaF 2 for UV lithography applications
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE·1998· 8 cited
<title>High-resolution calorimetric absorption measurements on optical components for excimer lasers</title>
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE·1997· 5 cited
<title>Pulse-length dependence of absorptance and degradation rate of fused silica at 248 nm</title>
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE·1997
<title>Multiple-pulse damage thresholds of optical components for excimer lasers</title>
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE·1997· 3 cited
Nonlinear absorption phenomena in optical materials for the UV-spectral range
Applied Surface Science·1997· 10 cited
Influence of the number of double layers on the damage threshold of Al{sub 2}O{sub 3}/SiO{sub 2} and LaF{sub 3}/MgF{sub 2} mirrors at 248 nm
OSTI OAI (U.S. Department of Energy Office of Scientific and Technical Information)·1996
<title>Nonlinear absorption phenomena in optical materials for the UV-spectral range</title>
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE·1996· 4 cited
Laser conditioning of LaF_3/MgF_2 dielectric coatings at 248 nm
Applied Optics·1996· 44 cited
Characterization of absorption and degradation on optical components for high-power excimer lasers
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE·1996
Influence of the number of double layers on the damage threshold of Al 2 O 3 /SiO 2 and LaF 3 /MgF 2 mirrors at 248 nm
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE·1996· 2 cited
Calorimetric measurement of two-photon absorption and color-center formation in ultraviolet-window materials
Applied Physics A·1996· 50 cited
Calorimetric measurement of two-photon absorption
Applied Physics A·1996· 4 citedOpen Access
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Frequent Co-authors

Klaus Mann(16), Norbert Kaiser(9), K. Mann(6), Uwe B. Schallenberg(4), B. Anton(4), R. Henking(3), Detlev Ristau(3), Oliver Apel(3), Roland Thielsch(3), Hein Uhlig(2), Ute Kaiser(2), Peter Weissbrodt(2), Dirk Mademann(2), L. Raupach(2), E. Hacker(2), Angela Duparré(2), B. Granitza(2), Joerg Heber(2), Alfons Zoeller(1), Rainer Goetzelmann(1)