Infineon Technologies (Germany) — Germany
Engineering · Physical Sciences
5h-index463citations8works0.02yr avg
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Research Topics
Advanced MEMS and NEMS Technologies(6), Force Microscopy Techniques and Applications(3), Mechanical and Optical Resonators(3), Semiconductor materials and devices(2), Advanced Surface Polishing Techniques(2)
Publications8 total
Sensors and Actuators A Physical·2002· 8 cited
Full Characterization and Long-Term Stability of Standard CMOS Materials for Integrated Micromechanical Applications
European Solid-State Device Research Conference·1999
Journal of Micromechanics and Microengineering·1996· 107 cited
Journal of Micromechanics and Microengineering·1995· 103 cited
Journal of Microelectromechanical Systems·1995· 208 cited
LPCVD-Polysilizium in der Mikromechanik Bestimmung der elastischen Eigenschaften
1995· 2 cited
Journal of Micromechanics and Microengineering·1992· 32 cited
Frequent Co-authors
Ε. Obermeier(4), Julia Maibach(3), Stefan Kolb(2), Bernhard Winkler(2), W. Werner(2), A Köprülülü(1), S Ballhausen Holm(1), Dieter Schneider(1), H. Kapels(1), Christofer Hierold(1), R. Schneider(1)