R. Somaschini

STMicroelectronics (Italy) — Italy

Engineering · Physical Sciences

5h-index157citations7works0.02yr avg
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Research Topics

Silicon and Solar Cell Technologies(4), Silicon Nanostructures and Photoluminescence(4), Semiconductor materials and devices(2), Thin-Film Transistor Technologies(2), Semiconductor materials and interfaces(2)

Publications7 total

Protective coatings of hafnium dioxide by atomic layer deposition for microelectromechanical systems applications
Applied Surface Science·2016· 13 cited
TEM sample preparation on photoresist
2009
A 65nm NOR flash technology with 0.042μm/sup 2/ cell size for high performance multilevel application
2006· 23 cited
Effect of heat treatment on the optical and electrical properties of nitrogen-doped silicon samples
Microelectronic Engineering·2003· 4 cited
Dislocation luminescence in nitrogen-doped Czochralski and float zone silicon
Journal of Physics Condensed Matter·2002· 22 cited
Optical properties of oxygen precipitates and dislocations in silicon
Journal of Applied Physics·2002· 87 cited
Optical Properties of Oxygen Agglomerates in Silicon
Diffusion and defect data, solid state data. Part B, Solid state phenomena/Solid state phenomena·2001· 8 cited

Frequent Co-authors

S. Binetti(4), S. Pizzini(4), E. Leoni(3), A. Castaldini(2), A. Cavallini(2), A. Le Donne(2), Dongsheng Li(2), Deren Yang(2), G. Servalli(1), D. Brazzelli(1), E. Camerlenghi(1), Gianfranco Capetti(1), Sonia Costantini(1), C. Cupeta(1), Danilo DeSimone(1), A. Ghetti(1), Tecla Ghilardi(1), P. Gulli(1), M. Mariani(1), A. R. Pavan(1)