Hubertus Marbach

Carl Zeiss (Germany) — Germany

Engineering · Physical Sciences

34h-index3.4kcitations132works1.02yr avg
OpenAlex↗Google Scholar↗Lab page↗

Accepting Students?

No reports yet. Know if this professor is taking students?

Research Topics

Surface Chemistry and Catalysis(58), Molecular Junctions and Nanostructures(54), Porphyrin and Phthalocyanine Chemistry(40), Electron and X-Ray Spectroscopy Techniques(28), Advanced Electron Microscopy Techniques and Applications(27)

Publications131 total

Investigation of ruthenium etching induced by electron beam irradiation and O2/Cl2 remote plasma-based neutral fluxes: Mechanistic insights and etching model
Journal of Vacuum Science & Technology A Vacuum Surfaces and Films·2025
Selective etching of ruthenium using electron beam-irradiation and Ar/O2/CF4 remote plasma-based surface functionalization: Comparisons to tantalum
Journal of Vacuum Science & Technology A Vacuum Surfaces and Films·2025· 2 cited
A combined gas-phase dissociative ionization, dissociative electron attachment and deposition study on the potential FEBID precursor [Au(CH<sub>3</sub>)<sub>2</sub>Cl]<sub>2</sub>
Beilstein Journal of Nanotechnology·2023· 6 citedOpen Access
Structure and Conformation of Individual Molecules upon Adsorption of a Mixture of Benzoporphyrins on Ag(111), Cu(111), and Cu(110) Surfaces
ChemPhysChem·2023Open Access
Front Cover: Structure and Conformation of Individual Molecules upon Adsorption of a Mixture of Benzoporphyrins on Ag(111), Cu(111), and Cu(110) Surfaces (ChemPhysChem 17/2023)
ChemPhysChem·2023Open Access
Structure and Conformation of Individual Molecules upon Adsorption of a Mixture of Benzoporphyrins on Ag(111), Cu(111), and Cu(110) Surfaces
ChemPhysChem·2023· 3 citedOpen Access
Electron beam-induced etching of SiO2, Si3N4, and poly-Si assisted by CF4/O2 remote plasma
Journal of Vacuum Science & Technology A Vacuum Surfaces and Films·2022· 5 cited
On the Electron-Induced Reactions of (CH3)AuP(CH3)3: A Combined UHV Surface Science and Gas-Phase Study
Nanomaterials·2022· 3 citedOpen Access
Nanoscale Ruthenium-Containing Deposits from Ru(CO)<sub>4</sub>I<sub>2</sub>via Simultaneous Focused Electron Beam-Induced Deposition and Etching in Ultrahigh Vacuum: Mask Repair in Extreme Ultraviolet Lithography and Beyond
ACS Applied Nano Materials·2022· 6 citedOpen Access
On the adsorption of different tetranaphthylporphyrins on Cu(111) and Ag(111)
Surface Science·2022· 6 cited
Pushing the limits of EUV mask repair: addressing sub-10 nm defects with the next generation e-beam-based mask repair tool
Journal of Micro/Nanopatterning Materials and Metrology·2021· 12 citedOpen Access
Low Energy Electron- and Ion-Induced Surface Reactions of Fe(CO)<sub>5</sub> Thin Films
The Journal of Physical Chemistry C·2021· 19 cited
Exploring the fabrication and transfer mechanism of metallic nanostructures on carbon nanomembranes via focused electron beam induced processing
Beilstein Journal of Nanotechnology·2021· 3 citedOpen Access
Self-Assembled 2D-Coordination Kagome, Quadratic, and Close-Packed Hexagonal Lattices Formed from a Cyano-Functionalized Benzoporphyrin on Cu(111)
The Journal of Physical Chemistry C·2021· 11 cited
Ultrathin Carbon Nanomembranes from 5,10,15,20-Tetraphenylporphyrin: Electron Beam Induced Fabrication and Functionalization via Focused Electron Beam Induced Processing
The Journal of Physical Chemistry C·2020· 2 citedOpen Access
Metalation of 2HTCNPP on Ag(111) with Zn: Evidence for the Sitting atop Complex at Room Temperature
ChemPhysChem·2020· 10 citedOpen Access
Surface Reactions of Low-Energy Argon Ions with Organometallic Precursors
The Journal of Physical Chemistry C·2020· 9 cited
Controlled Electron‐Induced Fabrication of Metallic Nanostructures on 1 nm Thick Membranes
Small·2020· 8 citedOpen Access
Cover Feature: Formation of Highly Ordered Molecular Porous 2D Networks from Cyano‐Functionalized Porphyrins on Cu(111) (Chem. Eur. J. 59/2020)
Chemistry - A European Journal·2020
High-end EUV photomask repairs for 5nm technology and beyond
2020· 4 cited
page 1 of 7Next →

Frequent Co-authors

Hans‐Peter Steinrück(37), Florian Buchner(19), Michael Stark(12), Stefanie Ditze(11), J. Michael Gottfried(8), Michael Röckert(8), Florian Vollnhals(7), M.K. Drost(7), Norbert Jux(6), Michael Schirmer(6), Ole Lytken(6), Ina Kellner(5), Thomas Lukasczyk(5), Jie Xiao(5), Sebastian Günther(5), R. Imbihl(5), Michael Lepper(5), Ken Flechtner(4), Elisabeth Zillner(4), Wolfgang Hieringer(4)