E. Bolmsjö

Obducat (Sweden) — Sweden

Engineering · Physical Sciences

1h-index21citations3works0.02yr avg
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Research Topics

Advancements in Photolithography Techniques(3), Nanofabrication and Lithography Techniques(3), Metal and Thin Film Mechanics(1), Force Microscopy Techniques and Applications(1), Advanced Surface Polishing Techniques(1)

Publications3 total

An alignment procedure for nanoimprint lithography at the sub-20 nm level
Lund University Publications (Lund University)·2005
Combination of electron beam recorders and imprint lithography for realisation of patterned media and next generation optical media
2005· 1 cited
Process development and characterization of antisticking layers on nickel-based stamps designed for nanoimprint lithography
Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena·2004· 20 cited

Frequent Co-authors

M. Beck(3), Babak Heidari(3), Lars Montelius(2), Matthias Keil(1), G. Frennesson(1), Elke Theander(1), T. Möller(1), R. Palm(1), David Adolph(1), Elke Theander(1), R Saers(1), Mariusz Graczyk(1), Dan Hessman(1), Ivan Maximov(1), Stefan Andersson‐Engels(1), Anders Persson(1), Claes-Göran Wahlström(1), Patrick Carlberg(1)