Miguel A. Gosálvez

University of the Basque Country — Spain

Engineering · Physical Sciences

23h-index1.7kcitations98works0.52yr avg
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Research Topics

Advanced MEMS and NEMS Technologies(27), Semiconductor materials and devices(23), Advanced Surface Polishing Techniques(18), Nanowire Synthesis and Applications(17), Acoustic Wave Resonator Technologies(13)

Publications98 total

Helium focused ion beam damage in silicon: Physics-informed neural network modeling of helium bubble nucleation and early growth
Journal of Computational Science·2025
Generalized damage profile function for subsurface damage in SiC induced by helium focused ion beam under line scanning at different energies and doses
Materials Science in Semiconductor Processing·2024· 2 cited
Helium Focused Ion Beam Damage in Silicon: Physics-Informed Neural Network Modeling of Helium Bubble Nucleation and Early Growth
SSRN Electronic Journal·2024Open Access
Helium Focused Ion Beam Damage in Silicon: Physics-Informed Neural Network Modeling of Helium Bubble Nucleation and Early Growth
SSRN Electronic Journal·2024Open Access
Helium focused ion beam induced subsurface damage on Si and SiC substrates: experiments and generative deep neural network modeling via position-dependent input
Journal of Materials Research and Technology·2023· 7 citedOpen Access
Etch and growth rates of GaN for surface orientations in the <0001> crystallographic zone: Step flow and terrace erosion/filling via the Continuous Cellular Automaton
Materials Science in Semiconductor Processing·2022· 7 cited
Evolutionary Kinetic Monte Carlo Simulation of Anisotropic Wet Etching of Sapphire at Different Concentrations and Temperatures
Journal of Microelectromechanical Systems·2021· 2 cited
Dominant contributions to the apparent activation energy in two-dimensional submonolayer growth: comparison between Cu/Ni(111) and Ni/Cu(111)
Journal of Physics Condensed Matter·2020· 2 cited
Simulation-based optimization of out-of-plane, variable-height, convoluted quartz micro needle arrays via single-step anisotropic wet etching
Microelectronic Engineering·2020· 8 cited
Multiscale Analysis of Phase Transformations in Self-Assembled Layers of 4,4′-Biphenyl Dicarboxylic Acid on the Ag(001) Surface
ACS Nano·2020· 21 cited
List of contributors
Elsevier eBooks·2020
Characterization of anisotropic wet etching of single-crystal sapphire
Sensors and Actuators A Physical·2019· 32 cited
Characterization of Orientation-Dependent Etching Properties and Surface Morphology of Sapphire Crystal in Wet Etching
2019· 3 cited
On the validity of the Arrhenius picture in two-dimensional submonolayer growth
arXiv (Cornell University)·2019· 1 citedOpen Access
Level Set Simulation of Surface Evolution in Anisotropic Wet Etching of Patterned Sapphire Subtrate
2019· 3 cited
A microscopic perspective on heterogeneous catalysis
arXiv (Cornell University)·2018· 2 citedOpen Access
The Maximum Positive Curvature Recognition Method to Determine Etch Profiles in Wet Etching of Quartz on AT and BT Cuts
Journal of Microelectromechanical Systems·2018· 10 cited
Microscopic Origin of the Apparent Activation Energy in Diffusion-Mediated Monolayer Growth of Two-Dimensional Materials
The Journal of Physical Chemistry C·2017· 6 cited
Transient and Stable Profiles During Anisotropic Wet Etching of Quartz
Journal of Microelectromechanical Systems·2017· 20 cited
The level set simulation for complex microstructures in quartz wet etching
2017· 1 cited
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Frequent Co-authors

K. Satō(22), Prem Pal(16), Yan Xing(16), R. M. Nieminen(10), Kazuo Sato(10), N. Ferrando(9), Adam S. Foster(6), Mitsuhiro Shikida(5), Hirotaka Hida(4), Joaquín Cerdá Boluda(4), Yuan Li(4), Hiroshi Tanaka(3), Bin Tang(3), Ricardo J. Colom(3), Xiaoli Qiu(3), Teemu Hynninen(3), Di Cheng(2), Shintaro Itoh(2), Bin Tang(2), Rafael Gadea Gironés(2)