Engineering · Physical Sciences
1h-index15citations1works0.02yr avg
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Research Topics
Semiconductor materials and devices(1), Copper Interconnects and Reliability(1), Anodic Oxide Films and Nanostructures(1)
Publications1 total
Journal of Vacuum Science & Technology A Vacuum Surfaces and Films·1989· 15 cited
Frequent Co-authors
Juan Esposito(1), Monty Cleeves(1), Sarah E. C. Whitney(1), R. E. Lionetti(1), C. E. Wickersham(1)