Centre National de la Recherche Scientifique — France
Engineering · Physical Sciences
3h-index75citations10works0.02yr avg
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Research Topics
Laser Material Processing Techniques(7), Integrated Circuits and Semiconductor Failure Analysis(3), Thin-Film Transistor Technologies(2), Silicon and Solar Cell Technologies(2), Advanced Surface Polishing Techniques(2)
Publications10 total
Sensors and Actuators A Physical·2015· 22 cited
Applied Physics A·2014· 35 cited
Materials Science and Engineering B·2012· 2 cited
Applied Surface Science·2012
Optimization of laser annealing for ultra-shallow junctions realization : characterization of homogeneity by laser beam induced current
HAL (Le Centre pour la Communication Scientifique Directe)·2011
HAL (Le Centre pour la Communication Scientifique Directe)·2010· 1 citedOpen Access
theses.fr (ABES)·2010Open Access
Laser activation of Ultra Shallow Junctions (USJ) doped by Plasma Immersion Ion Implantation
HAL (Le Centre pour la Communication Scientifique Directe)·2009
Applied Surface Science·2008· 15 cited
Frequent Co-authors
Philippe Delaporte(6), T. Sarnet(6), V. Vervisch(5), Frank Torregrosa(5), M. Sentis(4), Hasnaa Etienne(3), Ludovic Rapp(2), Cătălin Constantinescu(2), Anne‐Patricia Alloncle(2), F. Cristiano(2), M. Sentís(2), Abdou Karim Diallo(1), Christine Videlot‐Ackermann(1), G. Coustillier(1), V. Vervisch(1), H. Etienne(1), F. Torregrosa(1), Pier‐Francesco Fazzini(1), Ph. Delaporte(1), H. Eienne(1)