Lingling Pu

ASML (United States) — United States

Computer Science · Physical Sciences

7h-index153citations22works0.02yr avg
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Research Topics

Advanced Data Compression Techniques(11), Image and Signal Denoising Methods(7), Advancements in Photolithography Techniques(6), Digital Filter Design and Implementation(5), Industrial Vision Systems and Defect Detection(5)

Publications22 total

Holistic EPE measurement and qualification by large field of view (LFOV) contour-based metrology
2025
Unsupervised neural network-based image restoration framework for pattern fidelity improvement and robust metrology
Journal of Micro/Nanopatterning Materials and Metrology·2023· 5 citedOpen Access
Study On Weighted Binary Classifier with Imbalanced SEM Defect Data
2022 China Semiconductor Technology International Conference (CSTIC)·2022
Convolutional Neural Network (CNN) Based Automated Defect Classification (ADC) with Imbalanced Data
2021· 4 cited
Denoising sample-limited SEM images without clean data
Metrology, Inspection, and Process Control for Semiconductor Manufacturing XXXV·2021· 5 cited
Defect simulation in SEM images using generative adversarial networks
Metrology, Inspection, and Process Control for Semiconductor Manufacturing XXXV·2021· 12 cited
SEM image quality enhancement: an unsupervised deep learning approach
2020· 6 cited
Analyze line roughness sources using power spectral density (PSD)
2019· 6 cited
An optimized parameter guidance system for line/space CD metrology
2019· 1 cited
Compression Based on a Joint Task-Specific Information Metric
2015· 3 cited
Image compression based on task-specific information
2014· 9 cited
Model-based compressive diffusion tensor imaging
2011· 13 cited
Joint Source-Channel Rate Allocation in Parallel Channels
IEEE Transactions on Image Processing·2007· 12 cited
LDPC-Based Iterative Joint Source-Channel Decoding for JPEG2000
IEEE Transactions on Image Processing·2007· 58 cited
Joint source-channel rate allocation in parallel channels
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE·2007· 1 cited
Unequal error protection and progressive decoding for JPEG2000
Signal Processing Image Communication·2007· 2 cited
Joint source-channel rate allocation in parallel channels
2007
Joint Source/Channel Coding For JPEG2000
UA Campus Repository (The University of Arizona)·2007
Unequal error protection and progressive decoding for JPEG2000
2005· 7 cited
LDPC-BASED ITERATIVE JOINT SOURCE/CHANNEL DECODING SCHEME FOR JPEG2000
UA Campus Repository (The University of Arizona)·2004· 1 cited
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Frequent Co-authors

Ali Bilgin(11), Michael W. Marcellin(11), Bane Vasić(8), Zhenyu Wu(4), Liangjiang Yu(3), Hairong Lei(3), Cho Teh(3), Wei Fang(2), Wentian Zhou(2), Gino Fu(2), Ivan B. Djordjević(2), Theodore P. Trouard(1), Lee Ryan(1), Chuan Huang(1), María I. Altbach(1), I. Djordjevic(1), Zhe Wang(1), A. Ashok(1), Teng Wang(1), T. J. Huisman(1)