Yung-Kwon Sung

Korea University — South Korea

Engineering · Physical Sciences

1h-index7citations1works0.02yr avg
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Research Topics

Semiconductor materials and devices(1), Semiconductor materials and interfaces(1), Electron and X-Ray Spectroscopy Techniques(1)

Publications1 total

Recovery of Silicon Surface after Reactive Ion Etching of SiO<sub>2</sub> using CHF<sub>3</sub>/C<sub>2</sub>F<sub>6</sub> Plasma
Japanese Journal of Applied Physics·1996· 7 cited

Frequent Co-authors

Kwang‐Ho Kwon(1), Hyung‐Ho Park(1), Kyung-Soo Kim(1), Chang-II Kim(1)