Hyoungjae Kim

Korea Institute of Industrial Technology — South Korea

Engineering · Physical Sciences

17h-index1.0kcitations78works6.02yr avg
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Research Topics

Advanced Surface Polishing Techniques(69), Advanced machining processes and optimization(34), Diamond and Carbon-based Materials Research(21), Adhesion, Friction, and Surface Interactions(13), Advanced Machining and Optimization Techniques(11)

Publications78 total

Correlation between structured surface pad design and material removal rate in Chemical Mechanical Polishing
Journal of Manufacturing Processes·2025· 1 cited
Particle removal behavior of micropatterned pad buffing in post-CMP cleaning
Materials Science in Semiconductor Processing·2025· 3 cited
Enhancing CMP Performance of Micro-Structured Pad Patterns: CFD Simulations and Experimental Evaluations
ECS Journal of Solid State Science and Technology·2024· 13 citedOpen Access
Effect of Structures with Structured Surface Pad on Material Removal Rate in Chemical Mechanical Polishing
ECS Journal of Solid State Science and Technology·2024· 7 citedOpen Access
Approaches to Sustainability in Chemical Mechanical Polishing (CMP): A Review
International Journal of Precision Engineering and Manufacturing-Green Technology·2021· 157 citedOpen Access
Kinematic Prediction and Experimental Demonstration of Conditioning Process for Controlling the Profile Shape of a Chemical Mechanical Polishing Pad
Applied Sciences·2021· 8 citedOpen Access
Material Removal Model for Lapping Process Based on Spiral Groove Density
Applied Sciences·2021· 3 citedOpen Access
Ultrahigh Power Output from Triboelectric Nanogenerator Based on Serrated Electrode via Spark Discharge
Advanced Energy Materials·2020· 69 cited
Effect of the Lapping Platen Groove Density on the Characteristics of Microabrasive-Based Lapping
Micromachines·2020· 4 citedOpen Access
CMP 컨디셔너의 다이아몬드 입자 모양이 연마 패드 표면 형상 제어에 미치는 영향
2019
Effect of Relative Surface Charge of Colloidal Silica and Sapphire on Removal Rate in Chemical Mechanical Polishing
International Journal of Precision Engineering and Manufacturing-Green Technology·2019· 22 cited
Evaluation of Cutting Ability of Electroplated Diamond Wire Using a Test System and Theoretical Approach
International Journal of Precision Engineering and Manufacturing·2018· 17 cited
Self-dressing effect using a fixed abrasive platen for single-sided lapping of sapphire substrate
Journal of Mechanical Science and Technology·2017· 15 cited
Effect of Crystal Orientation on Material Removal Characteristics in Sapphire Chemical Mechanical Polishing
Journal of the Korean Society of Tribologists and Lubrication Engineers·2017· 1 citedOpen Access
Effects of Groove Shape Dimension on Lapping Characteristics of Sapphire Wafer
Journal of the Korean Society of Tribologists and Lubrication Engineers·2016Open Access
Effect of platen shape on evolution of total thickness variation in single-sided lapping of sapphire wafer
International Journal of Precision Engineering and Manufacturing-Green Technology·2016· 13 cited
Study on the Lapping Characteristics of Sapphire Wafer by using a Fixed Abrasive Plate
Journal of the Korean Society of Tribologists and Lubrication Engineers·2016· 1 citedOpen Access
A Study on Pressure Distribution for Uniform Polishing of Sapphire Substrate
Journal of the Korean Society of Tribologists and Lubrication Engineers·2016· 1 citedOpen Access
A Study of Material Removal Characteristics by Friction Monitoring System of Sapphire Wafer in Single Side DMP
Journal of the Korean Society of Tribologists and Lubrication Engineers·2016· 2 citedOpen Access
Characterization of diamond wire-cutting performance for lifetime estimation and process optimization
Journal of Mechanical Science and Technology·2016· 29 cited
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Frequent Co-authors

Haedo Jeong(41), Sangjik Lee(17), Taekyung Lee(14), Hyunseop Lee(10), Hanchul Cho(8), Doyeon Kim(6), Boumyoung Park(6), Sukhoon Jeong(6), Heondeok Seo(5), Doyeon Kim(5), Chuljin Park(4), Sukbae Joo(4), Sungryul Kim(4), Sung‐Min Park(3), Youngwook Park(3), Hokyoung Jung(3), Doyeon Kim(2), Hoyoun Kim(2), Sang-Ick Lee(2), Kihyun Park(2)