O. Legrani

Laboratoire Matériaux Optiques, Photonique et Systèmes — France

Engineering · Physical Sciences

5h-index102citations9works0.02yr avg
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Research Topics

Acoustic Wave Resonator Technologies(9), GaN-based semiconductor devices and materials(5), Mechanical and Optical Resonators(3), Advanced MEMS and NEMS Technologies(2), Metal and Thin Film Mechanics(2)

Publications9 total

Investigations of AlN thin film crystalline properties in a wide temperature range by in situ x-ray diffraction measurements: Correlation with AlN/sapphire-based SAW structure performance
IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control·2015· 9 citedOpen Access
High frequency-low loss SAW resonators built on NanoCrystalline Diamond-based substrate
2014Open Access
Packageless temperature sensor based on AlN/IDT/ZnO/Silicon layered structure
2013· 6 citedOpen Access
Platinum/AlN/Sapphire SAW resonator operating in GHz range for high temperature wireless SAW sensor
2013· 21 cited
AlN/IDT/AlN/Sapphire as packageless structure for SAW applications in harsh environments
2012· 3 cited
Deposition of crack-free 30 µm AlN on IDT/ZnO/Si for wave guiding layer acoustic wave applications
2011· 2 cited
Surface Acoustic Wave sensor based on AlN/Sapphire structure for high temperature and high frequency applications
2011· 5 cited
AlN/ZnO/Si structure - a packageless solution for acoustic wave sensors
2011· 3 cited
Highly textured growth of AlN films on sapphire by magnetron sputtering for high temperature surface acoustic wave applications
Journal of Vacuum Science & Technology A Vacuum Surfaces and Films·2011· 53 cited

Frequent Co-authors

Omar Elmazria(8), Thierry Aubert(4), Ausrine Bartasyte(4), P. Pigeat(3), Badreddine Assouar(2), E. Blampain(2), Keltouma Aït Aïssa(2), Abdelkrim Talbi(2), F. Sarry(2), Sergei Zhgoon(2), C. Tiuşan(1), S. Robert(1), Stefan McMurtry(1), F. Montaigne(1), Chen Fu(1), K. K. Lee(1), S.S. Yang(1), Pascal Boulet(1), Denis Mangin(1), Meriem Elhosni(1)