The University of Tokyo — Japan
Engineering · Physical Sciences
33h-index3.5kcitations269works0.02yr avg
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Research Topics
Metal and Thin Film Mechanics(84), Copper Interconnects and Reliability(49), Semiconductor materials and devices(40), Surface and Thin Film Phenomena(32), Diamond and Carbon-based Materials Research(28)
Publications269 total
Hyomen Kagaku·2017Open Access
The Cambridge Structural Database·2013Open Access
Vacuum·2012· 6 cited
Journal of the Vacuum Society of Japan·2012Open Access
Journal of the Vacuum Society of Japan·2012Open Access
Journal of The Surface Finishing Society of Japan·2012· 6 citedOpen Access
IOP Conference Series Materials Science and Engineering·2011· 1 citedOpen Access
Journal of the Vacuum Society of Japan·2011Open Access
Journal of the Vacuum Society of Japan·2011Open Access
Journal of the Vacuum Society of Japan·2011Open Access
Journal of the Vacuum Society of Japan·2011· 1 citedOpen Access
Journal of the Vacuum Society of Japan·2010Open Access
Journal of the Vacuum Society of Japan·2010Open Access
Journal of the Vacuum Society of Japan·2010Open Access
Journal of the Vacuum Society of Japan·2010Open Access
Journal of the Vacuum Society of Japan·2010Open Access
Journal of Vacuum Science & Technology A Vacuum Surfaces and Films·2007· 12 cited
Thin Solid Films·2007· 13 cited
Journal of The Surface Finishing Society of Japan·2007Open Access
The Cambridge Structural Database·2006Open Access
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Frequent Co-authors
Eiji Kusano(14), S. Baba(12), Hidehito Nanto(10), Namio MATUDA(7), Sadafumi Yoshida(6), Tomuo Yamaguchi(6), Naoto Kikuchi(4), S. Anami(4), Masaru Kitagawa(4), Tetsuo Yamaguchi(3), S. Yoshida(3), Akihiko Kobayashi(3), Akira Kikuchi(3), Shigeru Baba(3), M. Kawaji(2), Jianying Zhou(2), Hideaki Sugawara(2), M. Nishiura(2), Tatsuya Mukai(2), Yoshiteru Douguchi(2)