The University of Tokyo — Japan
Engineering · Physical Sciences
38h-index3.8kcitations167works0.92yr avg
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Research Topics
Advancements in Photolithography Techniques(57), Ion-surface interactions and analysis(45), Integrated Circuits and Semiconductor Failure Analysis(41), Electron and X-Ray Spectroscopy Techniques(36), Nanofabrication and Lithography Techniques(35)
Publications167 total
IEEE Transactions on Very Large Scale Integration (VLSI) Systems·2024· 4 cited
arXiv (Cornell University)·2024Open Access
IEEJ Transactions on Sensors and Micromachines·2022
Journal of Applied Physics·2007· 17 cited
AIP conference proceedings·2007
IEEE Transactions on Electron Devices·2006· 38 cited
Japanese Journal of Applied Physics·2006· 22 cited
Microelectronic Engineering·2006· 33 cited
Microelectronic Engineering·2006· 33 cited
Applied Physics Letters·2006· 17 cited
Microelectronic Engineering·2006· 36 cited
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Frequent Co-authors
Jun‐ichi Fujita(33), Shinji Matsui(18), Takashi Kaito(18), Masahiko Ishida(14), Kazuhiro Kanda(12), Yuichi Haruyama(12), Reo Kometani(10), M. Ishida(9), Takayuki Hoshino(8), T. Morita(7), Keiichiro Watanabe(7), S. Matsui(6), Toshitsugu Sakamoto(6), Satoshi� Matsui(6), K. Kondo(5), Toshinari Ichihashi(4), Masanori Komuro(4), T. Ichihashi(4), Eiichi Nomura(4), Hitoshi Wakabayashi(4)