Zhengquan Tan

Physics and Astronomy · Physical Sciences

12h-index480citations47works1.82yr avg
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Research Topics

Physics of Superconductivity and Magnetism(10), Advanced Condensed Matter Physics(9), Optical Coatings and Gratings(8), Magnetic and transport properties of perovskites and related materials(6), Electron and X-Ray Spectroscopy Techniques(6)

Publications47 total

Monitoring of hole-to-hole distance variance in 3D NAND using Axion x-ray critical dimension metrology
2026
Development of a Machine Learning Model to Predict Epidural-Related Maternal Fever During Labor Analgesia: A Multi-Algorithm Comparative Study with Prospective Implementation Framework
International Journal of Women s Health·2025Open Access
Determination of phenolic glyceride glycoside content in bulbs of different lily species (Lilium spp.) and the effect of processing on its composition
Journal of Food Composition and Analysis·2025
Scatterometry Critical Dimension Solution for Gate All Around Sheet-Specific Metrology: Topic/category: Advanced Metrology
2024
Novel ellipsometry metrology-based machine learning technique for low sensitivity characterization of critical dimensions within gate-all-around transistors
2024· 2 cited
Nutritional composition and sensory evaluation of tempeh from differentcombinations of beans
Food Research·2024· 14 citedOpen Access
Global tilt measurement on irregular PIL supporting patterns in 3D NAND memory
2024· 1 cited
CDSAXS study of 3D NAND channel hole etch pattern edge effects and etched hole pattern variance
2024· 3 cited
High throughput 3D NAND structure monitoring by x-ray scattering
2024· 1 cited
Leveraging x-ray scatterometry and machine learning to enable robust and high-throughput optical critical dimension metrology for advanced 3D flash memory contact hole profile
2024
Enable in-die overlay measurement on DRAM storage node by line scan self-calibration method
2024· 1 cited
Optical in die NZO benefit for DRAM manufacturing
2024· 1 cited
Global tilt extraction for BEOL contact landing displacement control
2024
Mueller matrix spectroscopy and physics-based machine learning for gate-all-around sheet-specific metrology
2023· 11 cited
Flash memory hole etch profile monitoring using x-ray and optical scatterometry
Journal of Micro/Nanopatterning Materials and Metrology·2023· 6 cited
Tracking the defects of ultra-thin HfO2 using a Cody-Lorentz multiple oscillator model
2018· 2 cited
Fabrication and electrocatalytic properties of ferromagnetic nanoporous PtFe by dealloying an amorphous Fe 60 Pt 10 B 30 alloy
Journal of Alloys and Compounds·2017· 22 cited
Fast and Accurate in-Line Monitor of Boron Implantation Energy and Dose by Spectroscopic Ellipsometry
ECS Transactions·2014
Fast and Accurate in-Line Monitor of Boron Implantation Energy and Dose by Spectroscopic Ellipsometry
ECS Meeting Abstracts·2014
Advanced Spectroscopic Ellipsometry Application for Multi-Layers Sige At 28nm Node and Beyond
ECS Meeting Abstracts·2013Open Access
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Frequent Co-authors

J. I. Budnick(10), Houssam Chouaib(7), Chao-Yu Cheng(6), S. M. Heald(5), Steve M. Heald(5), A. S. Cooper(5), Yung-Yi Lin(5), Zhiming Jiang(5), C. E. Bouldin(4), J. I. Budnick(4), Anderson Chou(4), Derrick Shaughnessy(4), Osman Sorkhabi(4), Shao-Ju Chang(4), Sheng-Min Chiu(4), Chien-Jen Huang(4), Juli Cheng(4), Getin Raphael(4), Christopher D. Liman(4), B.L. Chamberland(3)