H.‐J. Timme

Infineon Technologies (Germany) — Germany

Engineering · Physical Sciences

10h-index445citations15works0.02yr avg
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Research Topics

Advanced MEMS and NEMS Technologies(9), Acoustic Wave Resonator Technologies(9), Mechanical and Optical Resonators(5), Microwave Engineering and Waveguides(2), Advanced Sensor and Energy Harvesting Materials(2)

Publications15 total

Impact Of High Sc Content On Crystal Morphology And RF Performance Of Sputtered Al<sub>1-x</sub>Sc<sub>x</sub>N SMR BAW
2019· 16 cited
All-Pass Based Filter Design Using BAW Resonators
2019· 2 cited
An Integrated Gravimetric FBAR Circuit for Operation in Liquids Using a Flip-Chip Extended 0.13&amp;#x003BC;m CMOS Technology
2007· 8 cited
CMOS‐based Pressure Sensors
Advanced micro & nanosystems·2005· 6 cited
Integration of bulk acoustic wave filters: concepts and trends
2004· 26 cited
A miniature BAW duplexer using flip-chip on LTCC
2004· 17 cited
Biochemical sensors based on bulk acoustic wave resonators
2004· 25 cited
Advancement of MEMS into RF-filter applications
2003· 77 cited
A low-voltage torsional actuator for application in RF-microswitches
Sensors and Actuators A Physical·2001· 38 cited
Additive electroplating technology as a post-CMOS process for the production of MEMS acceleration-threshold switches for transportation applications
Journal of Micromechanics and Microengineering·2000· 104 cited
Low-cost post-CMOS integration of electroplated microstructures for inertial sensing
Sensors and Actuators A Physical·2000· 63 cited
Silicon micromachined microphone chip at Siemens
The Journal of the Acoustical Society of America·1999· 7 cited
Full integration of a pressure-sensor system into a standard BiCMOS process
Sensors and Actuators A Physical·1998· 42 cited
High pressure oxidation induced stress in submicron trench structures
Applied Physics Letters·1996· 3 cited
Effects of surface oxide on the rapid thermal nitridation of Si(001)
Journal of Vacuum Science & Technology A Vacuum Surfaces and Films·1996· 11 cited

Frequent Co-authors

Robert Aigner(6), Sven Michaelis(4), L. Elbrecht(4), J. Binder(3), S. Marksteiner(3), Michael Wycisk(2), Ralf Brederlow(2), W. Simbürger(2), Christian Paulus(2), R. Thewes(2), Andreas Bogner(2), Rudiger Bauder(2), Christian H. Reccius(2), Robert Weigel(2), Amelie Hagelauer(2), J. Ellä(1), W. Nessler(1), Thorsten Tonnesen(1), T. Scheiter(1), H. Kapels(1)