Shih‐Haur Shen

Applied Materials (United States) — United States

Engineering · Physical Sciences

11h-index663citations22works0.02yr avg
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Research Topics

Advanced Surface Polishing Techniques(12), Advanced machining processes and optimization(9), Advanced Control Systems Design(8), Fault Detection and Control Systems(6), Advanced Control Systems Optimization(5)

Publications22 total

Impact of Film Morphology on Chemical Mechanical Polishing of Tungsten
ECS Journal of Solid State Science and Technology·2016· 8 citedOpen Access
W CMP Initiation Mechanism Study Using in-Situ Metrologies
ECS Meeting Abstracts·2014· 1 cited
Metal Clearing Process Control in Metal CMP
ECS Transactions·2013
Metal Clearing Process Control in Metal CMP
ECS Meeting Abstracts·2012
Batch Sequencing for Run-to-Run Control:  Application to Chemical Mechanical Polishing
Industrial & Engineering Chemistry Research·2005· 4 cited
Multivariable control of multi-zone chemical mechanical polishing
2005· 2 cited
Multivariable Control of Multi-zone Chemical Mechanical Polishing
IFAC Proceedings Volumes·2004
Multivariable control of multizone chemical mechanical polishing
Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena·2004· 15 cited
Planarization Strategy of Cu CMP
Journal of The Electrochemical Society·2004· 6 cited
Application of soft landing to the process control of chemical mechanical polishing
Microelectronic Engineering·2003· 14 cited
Robust operation of copper chemical mechanical polishing
Microelectronic Engineering·2002· 21 cited
Selection of measurement locations for the control of rapid thermal processor
Automatica·2000· 29 cited
Operational Aspects of Chemical Mechanical Polishing Polish Pad Profile Optimization
Journal of The Electrochemical Society·2000· 36 cited
Autotune identification for systems with right-half-plane poles and zeros
Journal of Process Control·1999· 7 cited
Use of biased‐relay feedback for system identification
AIChE Journal·1996· 165 cited
Use of saturation-relay feedback for autotune identification
Chemical Engineering Science·1996· 53 cited
Sequential identification: A procedure for insuring internal consistency of steady‐state gains for multivariable systems
The Canadian Journal of Chemical Engineering·1996· 5 cited
Autotune Identification under Load Disturbance
Industrial & Engineering Chemistry Research·1996· 59 cited
Use of relay‐feedback test for automatic tuning of multivariable systems
AIChE Journal·1994· 193 cited
Autotuning of Distillation Control Systems
Process Industries Power the Pacific Rim: Sixth Conference of the Asia Pacific Confederation of Chemical Engineering; Twenty-first Australasian Chemical Engineering Conference; Official Proceedings of Combined Conference 1993·1993
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Frequent Co-authors

Cheng‐Ching Yu(18), Ingemar Carlsson(4), Tzu‐Yu Liu(4), Bogdan Swedek(4), Wen‐Chiang Tu(4), Sheng-Jyh Shiu(3), An‐Jhih Su(3), Jiun‐Sheng Wu(2), Hong-Den Yu(2), Jian-Bin Chiu(2), Kun Xu(2), Tomohiko Kitajima(2), You Wang(2), Xinyun Xia(2), Doyle Bennett(2), Lakshmanan Karuppiah(2), Cheng‐Yu Chen(1), Melissa Ho(1), Chi-Jay Huang(1), Yi-Chung Kao(1)