Ministry of Public Health — CD
Engineering · Physical Sciences
19h-index1.5kcitations80works0.52yr avg
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Research Topics
Advanced MEMS and NEMS Technologies(22), Metamaterials and Metasurfaces Applications(17), Gas Sensing Nanomaterials and Sensors(11), Advanced Antenna and Metasurface Technologies(9), Neuroscience and Neural Engineering(9)
Publications80 total
IEEE Sensors Journal·2025Open Access
Food Science & Nutrition·2025· 1 citedOpen Access
2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS)·2022
Development of planar-type uni-leg silicon thermoelectric generator with large integration
The Japan Society of Applied Physics·2021
Development of planar-type uni-leg silicon thermoelectric generator with cap structure
The Japan Society of Applied Physics·2021
Sensors and Materials·2019· 4 citedOpen Access
Fabrication and evaluation of planar-type Si thermoelectric harvesters by nanoimprint lithography
The Japan Society of Applied Physics·2019
Si thin film thermoelectric device based on phonon engineering
The Japan Society of Applied Physics·2019
Annealing time dependence of thermal conductivity of poly-Si PnC nanostructures
The Japan Society of Applied Physics·2018
Design of poly-Si thermoelectric device by nano structuring
The Japan Society of Applied Physics·2017
The Proceedings of Mechanical Engineering Congress Japan·2016Open Access
Simulation study of SU-8 structures realized by single-step projection photolithography
IEEE Conference Proceedings·2016
Biomedizinische Technik/Biomedical Engineering·2016· 2 cited
2014 Solid-State, Actuators, and Microsystems Workshop Technical Digest·2014· 1 citedOpen Access
HAL (Le Centre pour la Communication Scientifique Directe)·2014Open Access
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE·2013· 2 cited
Journal of Applied Physics·2012· 14 cited
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Frequent Co-authors
H. Baltes(16), Henry Baltes(10), Patrick Ruther(8), R. Beigang(7), Marco Rahm(6), N. Schneeberger(6), Christian Imhof(5), Oliver Brand(4), M. von Arx(4), Benjamin Reinhard(3), M. Rahm(3), Remigius Zengerle(3), David Westberg(3), B. Lägel(2), Sandra Wolff(2), J. Heinrich(2), Sven Höfling(2), A. Forchel(2), Peter Weis(2), Tom Torfs(2)