Th. Westerwalbesloh

Physics and Astronomy · Physical Sciences

10h-index4.0kcitations18works0.02yr avg
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Research Topics

Laser-Matter Interactions and Applications(12), Mass Spectrometry Techniques and Applications(8), Advanced Chemical Physics Studies(5), Advancements in Photolithography Techniques(5), Electron and X-Ray Spectroscopy Techniques(4)

Publications18 total

Atomic transient recorder
RePEc: Research Papers in Economics·2010
Effect of substrate roughness on Mo/Si multilayer optics for EUVL produced by UHV-e-beam evaporation and ion polishing
RePEc: Research Papers in Economics·2010
A new approach for actinic defect inspection of EUVL multilayer mask blanks: Standing wave photoemission electron microscopy
Microelectronic Engineering·2006· 6 cited
High-resolution actinic defect inspection for extreme ultraviolet lithography multilayer mask blanks by photoemission electron microscopy
Applied Physics Letters·2006· 7 cited
Attosecond Metrology with Controlled Light Waveforms
Arthroscopy Sports Medicine and Rehabilitation·2005· 11 cited
Toward time-resolved soft X-ray microscopy using pulsed fs-high-harmonic radiation
Ultramicroscopy·2004· 42 cited
Direct Measurement of Light Waves
Science·2004· 676 citedOpen Access
Aperiodic nanometer multilayer systems as optical key components for attosecond electron spectroscopy
Thin Solid Films·2004· 35 cited
Time-resolved electron spectroscopy of atomic inner-shell dynamics
Journal of Electron Spectroscopy and Related Phenomena·2004· 26 cited
Atomic transient recorder
Nature·2004· 1.3k cited
Multilayer EUV Optics for Applications of Ultrashort High Harmonic Pulses
Springer series in optical sciences/SPringer series in optical sciences·2004· 2 cited
Time-Resolved Inner Shell Spectroscopy with Sub-fs EUV Pulses
Springer series in optical sciences/SPringer series in optical sciences·2004
Reproducible Generation and Measurement of Isolated Sub-fs XUV Pulses with Phase-Controlled Few-Cycle Light
Springer series in optical sciences/SPringer series in optical sciences·2004· 2 cited
Determination of layer-thickness fluctuations in Mo/Si multilayers by cross-sectional HR-TEM and X-ray diffraction
Applied Physics A·2003· 10 cited
Effect of substrate roughness on Mo/Si multilayer optics for EUVL produced by UHV-e-beam evaporation and ion polishing
Thin Solid Films·2003· 16 cited
Time-resolved atomic inner-shell spectroscopy
Nature·2002· 1.4k citedOpen Access
Steering Attosecond Electron Wave Packets with Light
Science·2002· 355 citedOpen Access
Fabrication and characterization of EUV multilayer mirrors optimized for small spectral reflection bandwidth
Applied Physics A·2001· 50 cited

Frequent Co-authors

U. Kleineberg(16), U. Heinzmann(15), Reinhard Kienberger(9), M. Uiberacker(9), Markus Drescher(7), Armin Scrinzi(6), Ferenc Krausz(5), E. Goulielmakis(5), Andrius Baltuška(5), Michael Hentschel(4), Vladislav S. Yakovlev(4), Wiebke Hachmann(4), Y.C. Lim(3), Andreas Wonisch(3), U. Heinzmann(3), F. Bammer(2), Ferenc Krausz(2), F. Krausz(2), Christian Spielmann(2), Marek Wieland(2)