MCNC Research and Development Institute — United States
Engineering · Physical Sciences
2h-index34citations3works0.02yr avg
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Research Topics
Advanced MEMS and NEMS Technologies(3), Photonic and Optical Devices(1), Advanced Surface Polishing Techniques(1), Semiconductor Lasers and Optical Devices(1), 3D IC and TSV technologies(1)
Publications3 total
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE·1996
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE·1995· 32 cited
Advancing MEMS Technology Usage through the MUMPS (Multi-User MEMS Processes) Program
NASA Technical Reports Server (NASA)·1995· 2 cited
Frequent Co-authors
Allen Cowen(3), V.R. Dhuler(3), Karen W. Markus(2), David Koester(2), Don Roberson(1), L. Smith(1), K. Markus(1), A. Shishkoff(1)