Chan-Uk Jeon

Gachon University — South Korea

Engineering · Physical Sciences

8h-index306citations88works0.52yr avg
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Research Topics

Advancements in Photolithography Techniques(79), Electron and X-Ray Spectroscopy Techniques(40), Integrated Circuits and Semiconductor Failure Analysis(31), Industrial Vision Systems and Defect Detection(16), Advanced Surface Polishing Techniques(14)

Publications88 total

Polycyclic Aromatic Hydrocarbon-Derived Hydrophilic Carbon Dots as an Excellent NIR-Triggered Phototherapeutic Bactericidal Agent
Korean Journal of Chemical Engineering·2025
A Prediction Model for the Number of Spectators in the Korean Professional Baseball League Using Keyword Search Volume
Korean Journal of Sport Management·2024· 1 cited
Estimation of critical dimension and line edge roughness using a neural network
Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena·2021
3D modeling of electron-beam lithographic process from scanning electron microscope images
Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena·2021
Effects of abnormal beams on writing qualities in massively-parallel e-beam systems
Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena·2019· 5 cited
Multirow writing method for massively-parallel electron-beam systems
Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena·2019· 3 cited
Requirements of data technology for EUV photomask
2019· 10 cited
Effects of lithographic parameters in massively parallel electron-beam systems
Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena·2018· 2 cited
Improving mask yield by implementing an advanced mask blank inspection system
2018· 1 cited
EUV Mask and EUV Mask Metrology
SPIE eBooks·2018
Effects of stochastic exposure on critical dimension in electron-beam lithography
Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena·2017· 3 cited
EUV mask readiness for HVM (Conference Presentation)
2017
Multi-beam mask writer MBM-1000
2017· 2 cited
MTO-like reference mask modeling for advanced inverse lithography technology patterns
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE·2017
Influence of a non-ideal sidewall angle of extreme ultra-violet mask absorber for 1 ×-nm patterning in isomorphic and anamorphic lithography
Microelectronic Engineering·2017· 4 cited
Noise filtering for accurate measurement of line edge roughness and critical dimension from SEM images
Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena·2016· 7 cited
Analytic estimation of line edge roughness for large-scale uniform patterns in electron-beam lithography
Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena·2016· 2 cited
Improvement of photomask CD uniformity using spatially resolved optical emission spectroscopy
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE·2016· 1 cited
The technical consideration of multi-beam mask writer for production
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE·2016· 5 cited
Formation mechanism of the photomask blanks material related haze
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE·2016· 3 cited
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Frequent Co-authors

Jin Choi(16), In-Kyun Shin(12), Soo-Young Lee(9), Won-Il Cho(7), Patrick A. Kearney(6), Sang-Hee Lee(6), In Kyun Shin(6), Dong Hoon Chung(6), Byung‐Gook Kim(5), Rui Guo(4), Jihoon Na(4), Han-Ku Cho(4), Shuichi Tamamushi(4), Jaehyuck Choi(4), Stefan Wurm(3), Eric M. Gullikson(3), Hak-Seung Han(3), Byung-Sup Ahn(3), Seom-Beom Kim(3), Han-Shin Lee(3)