Ming L. Yu

Utah Valley UniversityUnited States

Engineering · Physical Sciences

29h-index2.8kcitations87works0.02yr avg

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Research Topics

Ion-surface interactions and analysis(41), Semiconductor materials and devices(29), Electron and X-Ray Spectroscopy Techniques(24), Metal and Thin Film Mechanics(14), Advanced Chemical Physics Studies(13)

Publications87 total

Journal of Physics Energy·2023· 14 citedOpen Access
Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena·2005· 6 cited
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE·2005· 5 cited
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE·2005· 3 cited
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE·2005· 5 cited
Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena·2004· 22 cited
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE·2003· 6 cited
arXiv (Cornell University)·2002· 1 citedOpen Access
Applied Surface Science·1999· 2 cited
Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena·1996· 16 cited
Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena·1995· 26 cited
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Frequent Co-authors

W. Reuter(4), B. W. Hussey(4), Benjamin N. Eldridge(3), U. Memmert(3), D. Grischkowsky(3), A. C. Balant(3), W.A. Mackie(3), Norton D. Lang(2), B.S. Meyerson(2), T. F. Kuech(2), Ho-Seob Kim(2), T. H. P. Chang(2), T. H. P. Chang(2), Wenwen Liu(2), Yanyan Hou(2), Hongjie Zhang(2), N.I. Buchan(2), R. Souda(2), N. D. Lang(1), D. J. Vitkavage(1)