L. P. Muray

Agilent Technologies (United States) — United States

Engineering · Physical Sciences

14h-index609citations24works0.02yr avg
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Research Topics

Advancements in Photolithography Techniques(15), Electron and X-Ray Spectroscopy Techniques(13), Surface and Thin Film Phenomena(7), Advanced Electron Microscopy Techniques and Applications(5), Nanofabrication and Lithography Techniques(5)

Publications24 total

Blanking characteristics of a miniature electron beam column
Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena·2010
Variable probe current using a condenser lens in a miniature electron beam column
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE·2009· 3 cited
Multiple beam sub-80-nm lithography with miniature electron beam column arrays
Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena·2007· 9 cited
Silicon photodiodes for low-voltage electron detection in scanning electron microscopy and electron beam lithography
Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena·2006· 14 cited
Sub- 100-nm lithography with miniature electron beam columns
Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena·2006· 20 cited
Arrayed miniature electron beam columns for mask making
Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena·2006· 15 cited
Multiple electron-beam lithography
Microelectronic Engineering·2001· 122 cited
Advances in arrayed microcolumn lithography
Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena·2000· 51 cited
Optimization of microcolumn electron optics for high-current applications
Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena·2000· 11 cited
Experimental evaluation of arrayed microcolumn lithography
Microelectronic Engineering·2000· 16 cited
Thermal stability of uniform silver clusters prepared on oxidized silicon and aluminum surfaces by electron beam lithography in oxidizing and reducing ambients
Catalysis Letters·1997· 30 cited
Fabrication of miniaturized electrostatic deflectors using LIGA
1997Open Access
Oxygen processed field emission tips for microcolumn applications
Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena·1993· 24 cited
Arrayed miniature electron beam columns
Microelectronic Engineering·1993· 4 cited
Miniaturized Electron Microscope
1993
A Scanning Tunneling Microscope Based Microcolumn System
Japanese Journal of Applied Physics·1992· 18 cited
Arrayed miniature electron beam columns for high throughput sub-100 nm lithography
Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena·1992· 89 cited
Performance measurements of a 1-keV electron-beam microcolumn
Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena·1992· 14 cited
Experimental evaluation of a scanning tunneling microscope-microlens system
Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena·1991· 22 cited
Investigation of emitter tips for scanning tunneling microscope-based microprobe systems
Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena·1991· 13 cited
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Frequent Co-authors

T. H. P. Chang(13), D. P. Kern(11), J. P. Spallas(9), U. Staufer(7), C. S. Silver(6), Marián Maňkoš(4), C. Stebler(3), Yautzong Hsu(3), Max Gmür(2), T. H. P. Chang(2), Kim Y. Lee(1), K. Lee(1), Mingxu Yang(1), Peter W. Jacobs(1), Chankeun Yoon(1), Esther M. Anderson(1), David Attwood(1), Gábor A. Somorjai(1), Hae Soung Kim(1), Mingzhu Yu(1)