Applied Materials (United States) — United States
Engineering · Physical Sciences
1h-index18citations3works0.02yr avg
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Research Topics
Semiconductor materials and devices(3), Plasma Diagnostics and Applications(2), Metal and Thin Film Mechanics(1), Advancements in Semiconductor Devices and Circuit Design(1), Silicon and Solar Cell Technologies(1)
Publications3 total
ECS Transactions·2010· 17 cited
Effect of surface polymerization on plasma and process stability in polycrystalline-silicon etching
HAL (Le Centre pour la Communication Scientifique Directe)·2002
Sidewall Passivation Mechanism of CF4 added Polysilicon Gate Etch Process
HAL (Le Centre pour la Communication Scientifique Directe)·2001· 1 cited
Frequent Co-authors
L. Vallier(2), O. Joubert(2), Shashank Deshmukh(2), Maxime Darnon(1), Camille Petit‐Etienne(1), Erwine Pargon(1), Gilles Cunge(1), P. Bodart(1), Moritz Haas(1), S. Banna(1), F. Ameri(1), D. Podlesnik(1), S. Xu(1), Olivier Joubert(1)