Jin-Sik Jung

Samsung (South Korea) — South Korea

Engineering · Physical Sciences

3h-index16citations5works0.02yr avg
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Research Topics

Advancements in Photolithography Techniques(3), Welding Techniques and Residual Stresses(2), Advanced optical system design(2), Laser Material Processing Techniques(1), Optical Coatings and Gratings(1)

Publications5 total

A new paradigm for haze improvement: retardation of haze occurrence by creating mask substrate insensitive to chemical contamination level
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE·2008· 3 cited
Prevention of chemical residue from growing into Haze defect on PSM pattern edge after normal cleaning process
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE·2008· 7 cited
Substrate effects on the characteristics of haze defect formation on the photomask surface under exposure condition
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE·2007· 6 cited
Optical performance enhancement technique for 45-nm node with binary mask
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE·2007
Optical performance enhancement technique for 45-nm-node with binary mask
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE·2007

Frequent Co-authors

Han-Ku Cho(4), Jaehyuck Choi(3), Han-Shin Lee(3), Sang-Gyun Woo(3), Jong-Keun Oh(2), Soo‐Jung Kang(2), Hee-Bom Kim(2), Jeung-Woo Lee(2), Hae-Yong Jeong(1), Yong‐Hoon Kim(1), Byung Cheol(1), Hae-Young Jeong(1), Sung‐Woon Choi(1), Woo-Sung Han(1)