Sang-Gyun Woo

Engineering · Physical Sciences

8h-index328citations95works0.02yr avg
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Research Topics

Advancements in Photolithography Techniques(79), Integrated Circuits and Semiconductor Failure Analysis(30), Optical Coatings and Gratings(13), Electron and X-Ray Spectroscopy Techniques(13), Advanced Surface Polishing Techniques(12)

Publications95 total

Rapid and Safe Human Detection in Uninhabited Terrains Integrating Formation Flight and Multispectral Imaging
International Journal of Control Automation and Systems·2025
Plasma monitoring of chrome dry etching for mask making
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE·2010
Mask writing time explosion and its effect on CD control in e-beam lithography
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE·2010· 13 cited
Requirements of e-beam size and position accuracy for photomask of sub-32 nm HP device
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE·2010· 3 cited
Trade-off between inverse lithography mask complexity and lithographic performance
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE·2009· 57 cited
E-beam shot count estimation at 32 nm HP and beyond
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE·2009· 9 cited
The novel plasma etching process for defect reduction in photomask fabrication
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE·2009· 2 cited
Optimization of mask manufacturing rule check constraint for model based assist feature generation
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE·2008· 2 cited
Resist charging effect in photomask: Its impact on pattern placement error and critical dimension
Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena·2008· 2 cited
A new paradigm for haze improvement: retardation of haze occurrence by creating mask substrate insensitive to chemical contamination level
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE·2008· 3 cited
Mask process monitoring with optical CD measurements for sub-50-nm
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE·2008
Control of the sidewall angle of an absorber stack using the Faraday cage system for the change of pattern printability in EUVL
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE·2008· 3 cited
Distributed processing (DP) based e-beam lithography simulation with long range correction algorithm in e-beam machine
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE·2008
Image placement error of photomask due to pattern loading effect: analysis and correction technique for sub-45 nm node
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE·2008· 4 cited
Predicting conversion time of circuit design file by artificial neural networks
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE·2008
영화 에 대한 문학적 접근과 영시강의에서의 활용
2007
Full-chip-based subresolution assist features correction for mask manufacturing
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE·2007· 1 cited
Requirements of photomask registration for the 45nm node and beyond: Is it possible?
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE·2007· 1 cited
2D measurement using CD SEM for arbitrarily shaped patterns
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE·2007· 2 cited
Improvement of mask CD uniformity for below 45-nm node technology
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE·2007
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Frequent Co-authors

Han-Ku Cho(29), Woo-Sung Han(13), Joo-Tae Moon(9), Hyunwoo Kim(7), Han Ku Cho(6), Seungbum Hong(6), Sung‐Chul Lim(6), Kwangsoo No(6), Sukjoo Lee(6), Jin Choi(5), Byung Gook Kim(5), Chan Hwang(5), Sang-Jun Choi(5), Insung Kim(5), Jangho Shin(4), Sang Hee Lee(4), Zhong‐Tao Jiang(4), Young-Bum Koh(4), Byeong‐Soo Bae(4), Hyunwoo Kim(4)