Chan Hwang

Engineering · Physical Sciences

7h-index207citations44works1.32yr avg
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Research Topics

Advancements in Photolithography Techniques(30), Integrated Circuits and Semiconductor Failure Analysis(13), Optical Coatings and Gratings(9), Advanced Surface Polishing Techniques(7), Semiconductor materials and devices(6)

Publications44 total

Analysis of scan fingerprint characteristics in the frequency domain and their impact on scan speeds and DRAM structure properties
2026
Low-NA EUV extension technology of contact patterning using MOR process
2025
Dual-camera imaging overlay metrology on center of symmetry for on-product overlay stability
2025· 1 cited
Implementation of Two-Signature Security on an Identity Storage Smart Contract
Lecture notes on data engineering and communications technologies·2025· 1 cited
Holistic patterning technology for DRAM 29nm pitch contact hole and pillar patterning
2024· 2 cited
Lithography technology for memory device patterning
2024· 1 cited
Multi-wavelength continuous-bias DBO metrology for improved ADI process-robustness
2024· 4 cited
EPE-aware process optimization for scanner dose and overlay in DRAM use case
2023· 4 cited
Using active asymmetry control and blind source separation to improve the accuracy of after develop overlay measurements
2023
Absolute overlay measurement with voltage contrast edge placement metrology
Metrology, Inspection, and Process Control XXXVI·2022· 2 cited
Improved multi-lot overlay performance via phase based ADI overlay measurements
Metrology, Inspection, and Process Control XXXVI·2022· 5 cited
A wire waveguide channel for terabit-per-second links
Applied Physics Letters·2020· 17 cited
Taking the multi-wavelength DBO to the next level of accuracy and robustness
2020· 7 cited
Understanding advanced DRAM edge placement error budget and opportunities for control
2020· 6 cited
Enabling accurate and robust optical metrology of in device overlay
2020· 4 cited
Novel on-product focus metrology for EUV, enabling direct focus monitoring and control for EUV systems
2020· 2 cited
Two-wire Waveguide for Terabit DSL
Conference on Lasers and Electro-Optics·2020· 4 cited
A metal wire waveguide for terabit DSL
2019· 7 cited
Terabit DSLs
IEEE Communications Magazine·2018· 29 cited
Smart overlay metrology pairing adaptive deep learning with the physics based models used by a lithographic apparatus
2018· 5 cited
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Frequent Co-authors

Han-Ku Cho(11), Jeongjin Lee(11), Seung Yoon Lee(10), Joo-Tae Moon(8), J.M. Cioffi(6), Seungyoon Lee(6), Sang-Gyun Woo(6), Woo-Sung Han(5), Joon-Soo Park(5), Jeongho Yeo(5), Jangho Shin(5), Sukjoo Lee(5), Kenneth J. Kerpez(4), Marc Noot(4), Se-Ra Jeon(4), Dong-Seok Nam(4), Sang-Gyun Woo(4), Seungbin Yang(4), Thomas Kim(4), Inbeom Yim(4)