Sarah E. Atanasov

Intel (United States) — United States

Engineering · Physical Sciences

10h-index754citations16works0.02yr avg
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Research Topics

Semiconductor materials and devices(10), Electronic and Structural Properties of Oxides(6), Catalytic Processes in Materials Science(5), Copper Interconnects and Reliability(4), Metal-Organic Frameworks: Synthesis and Applications(2)

Publications16 total

Operating two exchange-only qubits in parallel
Nature·2025Open Access
HfO<sub>2</sub> Area Selective Deposition via Substrate-Dependent Area Selective Atomic Layer Etching
Chemistry of Materials·2025
Hafnia-Based FeRAM: A Path Toward Ultra-High Density for Next-Generation High-Speed Embedded Memory
2022 International Electron Devices Meeting (IEDM)·2022· 28 cited
(Invited) Using Inherent Substrate-Dependent Nucleation to Promote Metal and Metal Oxide Selective-Area Atomic Layer Deposition
ECS Meeting Abstracts·2016
(Invited) Using Inherent Substrate-Dependent Nucleation to Promote Metal and Metal Oxide Selective-Area Atomic Layer Deposition
ECS Transactions·2016· 3 cited
Inherent substrate-dependent growth initiation and selective-area atomic layer deposition of TiO2 using “water-free” metal-halide/metal alkoxide reactants
Journal of Vacuum Science & Technology A Vacuum Surfaces and Films·2015· 80 cited
Using Hydrogen To Expand the Inherent Substrate Selectivity Window During Tungsten Atomic Layer Deposition
Chemistry of Materials·2015· 77 cited
Delayed Dissolution and Small Molecule Release from Atomic Layer Deposition Coated Electrospun Nanofibers
Advanced Materials Interfaces·2015· 12 cited
Selective Growth and Organic/Inorganic Materials Integration by Atomic and Molecular Layer Deposition
NCSU Libraries Repository (North Carolina State University Libraries)·2015Open Access
Platinum-Free Cathode for Dye-Sensitized Solar Cells Using Poly(3,4-ethylenedioxythiophene) (PEDOT) Formed via Oxidative Molecular Layer Deposition
ACS Applied Materials & Interfaces·2015· 49 cited
Improved cut-resistance of Kevlar® using controlled interface reactions during atomic layer deposition of ultrathin (&lt;50 Å) inorganic coatings
Journal of Materials Chemistry A·2014· 38 cited
Metal–Organic Frameworks: Highly Adsorptive, MOF‐Functionalized Nonwoven Fiber Mats for Hazardous Gas Capture Enabled by Atomic Layer Deposition (Adv. Mater. Interfaces 4/2014)
Advanced Materials Interfaces·2014· 5 citedOpen Access
Highly Conductive and Conformal Poly(3,4-ethylenedioxythiophene) (PEDOT) Thin Films via Oxidative Molecular Layer Deposition
Chemistry of Materials·2014· 104 cited
Highly Adsorptive, MOF‐Functionalized Nonwoven Fiber Mats for Hazardous Gas Capture Enabled by Atomic Layer Deposition
Advanced Materials Interfaces·2014· 124 cited
Mechanisms and reactions during atomic layer deposition on polymers
Coordination Chemistry Reviews·2013· 207 cited
Solid Electrolyte Interphase on Lithium-Ion Carbon Nanofiber Electrodes by Atomic and Molecular Layer Deposition
Journal of The Electrochemical Society·2013· 27 cited

Frequent Co-authors

Gregory N. Parsons(13), Paul C. Lemaire(6), Christopher J. Oldham(5), Philip S. Williams(5), Berç Kalanyan(4), Mark D. Losego(3), Bo Gong(3), Christina K. Devine(2), Bo Gong(2), Kyoung-Mi Lee(2), Junjie Zhao(2), Trent M. Blevins(2), Howard J. Walls(2), Sarah D. Shepherd(2), Matthew A. Browe(2), Gregory W. Peterson(2), Chris Oldham(2), Erinn C. Dandley(1), Jesse S. Jur(1), Qing Peng(1)