Nicholas W. Jenkins

Joint Institute for Laboratory Astrophysics — United States

Physics and Astronomy · Physical Sciences

8h-index442citations36works1.12yr avg
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Research Topics

Advanced X-ray Imaging Techniques(17), Optical Coatings and Gratings(12), Advanced Electron Microscopy Techniques and Applications(9), Digital Holography and Microscopy(6), Advancements in Photolithography Techniques(5)

Publications36 total

Adaptive design of EUV scatterometry through efficient Bayesian inference
2026
Optimizing experimental design for fast and accurate CD metrology of interconnects using coherent extreme-ultraviolet scatterometry
Journal of Micro/Nanopatterning Materials and Metrology·2026
Optimized EUV scatterometry measurements with tunable high harmonic generation and the Fisher information matrix
2025
Lab-based multi-wavelength EUV diffractometry for critical dimension metrology
2025
Coherent EUV scatterometry of 2D periodic structure profiles with mathematically optimal experimental design
ArXiv.org·2025Open Access
Soft X-ray Diffraction at 6.7 nm with a Tabletop High Harmonic Source
2025
Robust broadband ptychography algorithms for high-harmonic soft X-ray supercontinua
Optics Express·2024· 7 citedOpen Access
Low-density diamondlike amorphous carbon at nanostructured metal-diamond interfaces
Physical Review Materials·2024· 4 cited
Multi-Modal Extreme-Ultraviolet Reflectometer: Solving Inverse Problems in Nanostructure Metrology
2024
EUV scatterometry: low-dose characterization of polymer-based metamaterials
2024· 1 cited
Extreme Ultraviolet Scatterometry for Characterizing Nanometer Scale Features in a Damascene Sample
2024· 1 cited
Multi-Modal Extreme-Ultraviolet Reflectometer: Solving Inverse Problems in Nanoscale Metrology
2024
Tabletop extreme ultraviolet reflectometer for quantitative nanoscale reflectometry, scatterometry, and imaging
Review of Scientific Instruments·2023· 20 cited
High-fidelity ptychographic imaging of highly periodic structures enabled by vortex high harmonic beams
Optica·2023· 48 citedOpen Access
Multi-modal tabletop EUV reflectometry for characterization of nanostructures
2023
High-fidelity ptychographic imaging of highly periodic structures enabled by vortex high harmonic beams
arXiv (Cornell University)·2023· 2 citedOpen Access
Nondestructive, high-resolution, chemically specific 3D nanostructure characterization using extreme ultraviolet, coherent diffractive imaging reflectometry
2023
Vortex High Harmonic Beams Enable High-Fidelity Ptychographic Imaging of Highly Periodic Structures
2023
Temporal and spectral multiplexing for EUV multibeam ptychography with a high harmonic light source
Optics Express·2022· 20 citedOpen Access
High-resolution, wavefront-sensing, full-field polarimetry of arbitrary beams using phase retrieval
Optics Express·2022· 4 citedOpen Access
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Frequent Co-authors

Henry C. Kapteyn(29), Michael Tanksalvala(23), Yuka Esashi(23), Margaret M. Murnane(23), Bin Wang(12), Yunzhe Shao(12), Zhe Zhang(10), Chen-Ting Liao(9), Michael Gerrity(8), Clay Klein(8), Christina L. Porter(7), Peter Johnsen(7), Joshua L. Knobloch(6), Naoto Horiguchi(6), Charles S. Bevis(6), Galen P. Miley(5), Brendan McBennett(5), Matthew N. Jacobs(5), Nathan J. Brooks(5), Iona Binnie(5)