Stefan Roling

GlobalFoundries (Germany) — Germany

Engineering · Physical Sciences

3h-index42citations10works0.02yr avg
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Research Topics

Advancements in Photolithography Techniques(9), Industrial Vision Systems and Defect Detection(4), Integrated Circuits and Semiconductor Failure Analysis(4), Electron and X-Ray Spectroscopy Techniques(3), VLSI and Analog Circuit Testing(2)

Publications10 total

OPC model sampling evaluation and weakpoint “in-situ” improvement
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE·2016
Rule-based OPC and MPC interaction for implant layers
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE·2015· 1 cited
Reticle and wafer CD variation for different dummy pattern
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE·2012· 5 cited
Source mask optimization methodology (SMO) and application to real full chip optical proximity correction
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE·2012· 19 cited
Simulation-based scanner tuning using FlexRay capability and scatterometry
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE·2011
Automatic CD-SEM offline recipe creation in a high volume production fab
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE·2008· 2 cited
Minimizing poly end cap pull back by application of DFM and advanced etch approaches for 65nm and 45 nm technologies
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE·2007· 1 cited
Golden curve method for OPC signature stability control in high MEEF applications
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE·2007· 1 cited
Process Window and Device Variations Evaluation using Array-Based Characterization Circuits
2006· 11 cited
Advanced DFM applications using design-based metrology on CD SEM
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE·2006· 2 cited

Frequent Co-authors

Cyrus Tabery(3), Guoxiang Ning(3), Andre Leschok(2), Sarah McGowan(2), Christian Buergel(2), Paul Ackmann(2), Nan Fu(2), Dongqing Zhang(1), GekSoon Chua(1), YeeMei Foong(1), Yi Zou(1), Stephen Hsu(1), Stanislas Baron(1), Mu Feng(1), Huayu Liu(1), Zhipan Li(1), Jessy Schramm(1), Yun Tang(1), Carl Babcock(1), Byoung Il Choi(1)