Zhongmei Han

Engineering · Physical Sciences

4h-index37citations8works0.02yr avg
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Research Topics

Semiconductor materials and devices(6), Ion-surface interactions and analysis(3), Nanowire Synthesis and Applications(2), Integrated Circuits and Semiconductor Failure Analysis(2), Catalytic Processes in Materials Science(1)

Publications8 total

Combining Focused Ion Beam Patterning and Atomic Layer Deposition for Nanofabrication
Työväentutkimus Vuosikirja·2018Open Access
Metal oxide multilayer hard mask system for 3D nanofabrication
Nanotechnology·2017· 9 cited
(Invited) Photo-Assisted ALD: Process Development and Application Perspectives
ECS Meeting Abstracts·2017· 1 cited
(Invited) Photo-Assisted ALD: Process Development and Application Perspectives
ECS Transactions·2017· 10 citedOpen Access
Resistless fabrication of embedded nanochannels by FIB patterning, wet etching and atomic layer deposition
2015
Selective etching of focused gallium ion beam implanted regions from silicon as a nanofabrication method
Nanotechnology·2015· 8 cited
Combining focused ion beam and atomic layer deposition in nanostructure fabrication
Nanotechnology·2014· 9 cited
Low-dislocation-density 50nm Ge Fin Fabrication on Si substrate
2009

Frequent Co-authors

Marko Vehkamäki(6), Mikko Ritala(6), Markku Leskelä(4), Kenichiro Mizohata(3), Ville Miikkulainen(2), Katja Väyrynen(2), Väinö Kilpi(2), J. Räisänen(2), Emma Salmi(2), Miika Mattinen(1), Chul‐Woong Chung(1), Shipei Huang(1), Guangcan Luo(1), C.H. Ko(1), C. Wann(1), H. Y. Lin(1), C. C. Cheng(1), C. H. Chien(1)