Vladimir Pashchenko

Silicon Austria Labs (Austria) — Austria

Engineering · Physical Sciences

9h-index250citations30works0.02yr avg
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Research Topics

Acoustic Wave Resonator Technologies(27), GaN-based semiconductor devices and materials(18), Metal and Thin Film Mechanics(8), Mechanical and Optical Resonators(8), Advanced MEMS and NEMS Technologies(7)

Publications30 total

Thin Film AlScN Solidly Mounted Lamé Mode Resonator with High Electromechanical Coupling
2025
Temperature Optimization of AlN-Based Hybrid-SAW/BAW Resonators with Compensated and High-Sensitivity Modes
2025
AlYN Thin Films with High Y Content: Microstructure and Performance
physica status solidi (RRL) - Rapid Research Letters·2023· 1 citedOpen Access
AlYN Thin Films with High Y Content: Microstructure and Performance
physica status solidi (RRL) - Rapid Research Letters·2023· 9 citedOpen Access
Vertical etching of Al<sub>0.7</sub>Sc<sub>0.3</sub>N for next generation of acoustic wave resonators
2023· 1 cited
Rayleigh waves in nonpolar Al0.7Sc0.3N(112¯0) films with enhanced electromechanical coupling and quality factor
Applied Physics Letters·2022· 9 citedOpen Access
Through-Wall Acoustically Linked Temperature Sensor
2022 IEEE International Ultrasonics Symposium (IUS)·2022
Detachable Ultrasonic Data Communication Through the Metal plate with NFC Technology
2022 IEEE International Ultrasonics Symposium (IUS)·2022
High temperature sensor exploiting hybrid BAW/SAW thin piezoelectric film transducer
2021
Growth, Properties, and Applications of Al<sub>1-x</sub>Sc<sub>x</sub>N Thin Films
2019Open Access
Freestanding and Solidly Mounted Lamb Wave Resonators based on Al0.85Sc0.15N Thin Films
2019
Free standing and solidly mounted Lamb wave resonators based on Al0.85Sc0.15N thin film
Applied Physics Letters·2019· 14 citedOpen Access
Material Parameter Extraction for Complex AlScN Thin Film Using Dual Mode Resonators in Combination with Advanced Microstructural Analysis and Finite Element Modeling
Advanced Electronic Materials·2019· 17 citedOpen Access
Abnormal Grain Growth in AlScN Thin Films Induced by Complexion Formation at Crystallite Interfaces (Phys. Status Solidi A 2∕2019)
physica status solidi (a)·2019· 5 citedOpen Access
Abnormal Grain Growth in AlScN Thin Films Induced by Complexion Formation at Crystallite Interfaces
physica status solidi (a)·2018· 103 citedOpen Access
Determination of Elastic and Piezoelectric Properties of Al<sub>0.84</sub>Sc<sub>0.16</sub>N Thin Films
2018· 4 citedOpen Access
AlScN and AlN – based hybrid BAW/SAW resonator with enhanced Q-factor and electromechanical coupling
2018
Material constants extraction for AlScN thin films using a dual mode baw resonator
2018· 3 citedOpen Access
Ex-situ AlN seed layer for (0001)-textured Al&lt;inf&gt;0.84&lt;/inf&gt;Sc&lt;inf&gt;0.16&lt;/inf&gt;N thin films grown on SiO&lt;inf&gt;2&lt;/inf&gt; substrates
2017 IEEE International Ultrasonics Symposium (IUS)·2017· 2 citedOpen Access
Effective SAW excitation on the non-piezoelectric substrate using the AlScN piezoelectric film BAW/SAW hybrid transducer
2017 IEEE International Ultrasonics Symposium (IUS)·2017· 6 cited
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Frequent Co-authors

Paul Muralt(16), Fazel Parsapour(13), Stefan Mertin(7), Pascal Nicolay(7), C.S. Sandu(6), Dmytro Solonenko(5), Bernd Heinz(4), Nicolas Kurz(4), Mohssen Moridi(4), Ramin Matloub(3), Thomas LaGrange(3), Sarah Risquez(3), Tamara Terzic(3), Vladimir Kalinin(3), V.P. Plessky(3), Ken Haffner(2), V. Lebedev(2), Hugo Chambon(2), Ingo Bleyl(2), Sylvain Ballandras(2)